用于单层和多层厚度测量的光电时频域系统的比较

2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) Pub Date : 2020-11-08 DOI:10.1109/IRMMW-THz46771.2020.9370519

L. Liebermeister, S. Nellen, R. Kohlhaas, S. Lauck, M. Deumer, S. Breuer, B. Globisch

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引用次数: 0

摘要

我们首次比较了光电频率和时域太赫兹(THz)系统在亚毫米单层和多层样品上的厚度测量，使用相同的设置，样品和评估程序，以获得可比的结果。我们发现，在23 μm ~ 350 μm厚度的单层PET和Kapton箔上，两种系统都能以相似的精度测量。因此，在未来的工业层厚度测量中，频域太赫兹系统可能取代时域系统。

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Comparison of Optoelectronic Time- and Frequency-Domain Systems for Single- and Multilayer Thickness Measurements

We present the first comparison of optoelectronic frequency- and time-domain terahertz (THz) systems for thickness measurements on sub-mm single- and multilayer samples using identical setups, samples and evaluation procedures in order to obtain comparable results. We find that single layer PET and Kapton foils with a thickness of 23 μm – 350 μm can be measured with similar accuracy with both systems. Hence, frequency-domain THz systems may replace time-domain systems in future industrial layer thickness measurements.

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2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)

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