利用飞秒激光制备低电阻率、高载流子浓度的zno基TCO

Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics Pub Date : 2022-01-01 DOI:10.1364/cleo_at.2022.jw3b.174

Yaoyao Liu, Qiang Wu, J. Yao, Jingjun Xu

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摘要

在不掺杂元素的情况下，通过飞秒激光加工获得了电阻率为1.93×10-4 Ω cm的zno基TCO。此外，载流子密度比原始密度提高了5个数量级。

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The ZnO-based TCO with low resistivity and high carrier concentration prepared by femtosecond laser

ZnO-based TCO with a resistivity of 1.93×10-4 Ω cm was achieved by femtosecond laser processing without elements doping. Besides, the carrier density increased by five orders of magnitude compared to the pristine one.

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Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics

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