100µA, 320 nT/vHz, 3-AXIS洛伦兹力MEMS磁强计

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI:10.1109/TRANSDUCERS.2015.7181045

G. Laghi, A. Longoni, P. Minotti, A. Tocchio, G. Langfelder

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引用次数: 5

摘要

该工作提出了一个基于四个微机电装置的地磁场测量模块:一个面外和两个面内差分洛伦兹力磁强计和一个唐谐振器。后者用于在非共振操作中提供参考频率，这种方式使磁力计能够共享相同的洛伦兹电流，从而使固有的消耗降低3倍。同时，采用多回路设计，与以前使用相同工艺的实现相比，灵敏度提高了5倍，分辨率提高了4倍。系统工作带宽可电子选择，最高可达50 Hz。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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100 µA, 320 nT/vHz, 3-AXIS Lorentz force MEMS magnetometer

The work presents a module for earth magnetic field measurements based on four microelectromechanical devices: one out-of-plane and two in-plane differential Lorentz-force magnetometers, and a Tang resonator. The latter is used to provide the reference frequency in off-resonance operation, a way that enables the magnetometers to share the same Lorentz current, giving an intrinsic 3-fold consumption decrease. At the same time, using multiple-loop design, a 5-fold larger sensitivity and a 4-fold better resolution are obtained with respect to previous implementations that used the same process. The system operating bandwidth is electronically selectable up to 50 Hz.

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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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