钒箔氮化硅的固态扩散键合:高磁场下固-固相变对材料结构和功能的控制

M. Maeda, O. Igarashi, T. Shibayanagi, M. Naka
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引用次数: 9

摘要

本文研究了氮化硅(si3n4)与钒(V)采用固态扩散连接形成的接头的界面显微组织与断裂强度的关系。首先,详细分析了界面微观结构及其演变过程。界面相序随键合时间的变化呈现出五个典型阶段。在第一阶段,形成一个v3si层和v2n晶粒。在1473 K及以下时,v2n晶粒与v3si层接触,而在1498 K及以上时则禁止接触。si3n4 / v3si界面是亚稳态的。在第二阶段,出现了v5si3n1 - x层。在第三阶段,V被湮灭。在第四阶段,v3si层被湮灭,VN晶粒形成。在第五阶段,v2n被湮灭。除了界面的亚稳态外,该界面微观结构的演化过程与所提出的化学势图基本一致。各反应产物厚度的增减行为相互作用。v3si层的行为不仅受v5si 3n1 - x层的形成和生长的影响,还受v3si /V界面处V(Si)区形成的影响。钒在钒硅层中的化学势的空间梯度减小到一定值时,钒硅氮1-X层开始形成。接头的断裂强度随焊接温度和时间的变化而变化。结合温度越高,最大断裂强度越高。当v3si层厚度为2.0μm时,各温度下的强度均达到最大。随着结合时间的延长,断裂强度逐渐降低至42 MPa。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Solid state diffusion bonding of silicon nitride using vanadium foils : Structural and functional control of materials through solid-solid phase transformations in high magnetic field
This paper describes the relation between the interfacial microstructure and the fracture strength of the joints of silicon nitride (Si 3 N 4 ) and vanadium (V) formed by solid state diffusion bonding. At first, the interfacial microstructure and its evolution process were analyzed in detail. The phase sequence at the interface changes with the bonding time showing five typical stages. In the first stage, a V 3 Si layer and V 2 N grains are formed. The V 2 N grains contact with the V 3 Si layer at 1473 K and below, while the contact is prohibited at 1498 K and above. The Si 3 N 4 /V 3 Si interface is metastable. In the second stage, a V 5 Si 3 N 1-X layer appears. In the third stage, V is annihilated. In the fourth stage, the V 3 Si layer is annihilated and VN grains are formed. In the fifth stage, V 2 N is annihilated. This evolution process of the interfacial microstructure agrees well with the proposed chemical potential diagram, except the metastable state of the interface. The increase and decrease behavior in the thickness of each reaction product interact with each other. The behavior of the V 3 Si layer is affected not only by the formation and growth of the V 5 Si 3 N 1-X layer but also by the formation of a V(Si) zone at the V 3 Si/V interface. The formation of the V 5 Si 3 N 1-X layer starts when the spatial gradient of the chemical potential of vanadium in the V 3 Si layer decreases to a certain value. The fracture strength of the joints changes depending on the bonding temperature and time. The higher bonding temperature leads to the higher maximum fracture strength. The maximum strength at each bonding temperature is achieved when the thickness of the V 3 Si layer is 2.0μm. The prolonged bonding time gradually reduces the fracture strength down to 42 MPa.
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