硅化物单晶和薄膜的电学和光学性质

F. Nava , K.N. Tu, O. Thomas, J.P. Senateur, R. Madar, A. Borghesi, G. Guizzetti, U. Gottlieb, O. Laborde, O. Bisi
{"title":"硅化物单晶和薄膜的电学和光学性质","authors":"F. Nava ,&nbsp;K.N. Tu,&nbsp;O. Thomas,&nbsp;J.P. Senateur,&nbsp;R. Madar,&nbsp;A. Borghesi,&nbsp;G. Guizzetti,&nbsp;U. Gottlieb,&nbsp;O. Laborde,&nbsp;O. Bisi","doi":"10.1016/0920-2307(93)90007-2","DOIUrl":null,"url":null,"abstract":"<div><p>Electrical transport and optical properties of transition-metal silicides are reviewed. They are integrated with thermal properties of single-crystal silicides. Most of these compounds behave as metals while some of them behave as semiconductors. The former show an increasing electrical resistivity ρ with increasing temperature. Several of them show a non-classical deviation of <em>ρ</em>(<em>T</em>) from linearity in the high-temperature limit. This deviation, related to intrinsic properties of the compound, can be affected both in sign and in amount by the presence of foreign atoms (impurities) and structural defects. Moreover, defects dominate the electrical transport at low temperatures both in metallic and semiconducting compounds. Therefore, the interpretation of the electrical properties measured as a function of temperature may give a non-realistic description of silicide intrinsic properties. Since also other physical properties, like thermal and optical ones, can be strongly affected by impurities and defects, results about single-crystal silicides will be first illustrated. Single-crystal preparation and structural characterization are described in detail, with emphasis on crystalline quality in terms of residual resistivity ratio. The electrical quantities, resistivity and magnetoresistance, are measured as a function of temperature and along the main crystallographic directions. The effect of impurities and defects on the transport properties is then evaluated by examining the electrical transport of polycrystalline thin-film silicides. The different contributions to the total resistivity are measured by changing: (i) film stoichiometry, (ii) impurity concentration, (iii) texture growth and (iv) film thickness. Hall-coefficient measurements are briefly discussed with the main purpose to evidence that great caution is necessary when deducing mobility and charge-carrier density values from these data. The theoretical models currently used to interpret the low- and high-temperature resistivity behavior of the metallic silicides are presented and used to fit the experimental resistivity curves. The results of these studies reveal that in several cases there are well-defined temperature ranges in which a specific electron—phonon scattering mechanism dominates. This allows a more detailed study of the microscopic processes. The optical functions from the far-infrared to the vacuum ultraviolet, derived from Kramers—Krönig analysis of reflectance spectra or directly measured by spectroscopic ellipsometry, are presented and discussed for some significant metallic disilicides, both single crystals and polycrystalline films. Different physical phenomena are distinguished in the spectra: intraband transitions at the lowest photon energies, interband transitions at higher energies, and collective oscillations. In particular, the free-carrier response derived from this analysis is compared with the transport results. The interpretation of the experimental spectra is based on the calculated electronic structures or optical functions. Moreover, it is shown how the optical studies contribute to assess definitively the semiconducting character of some disilicides. Specific-heat measurements on single crystals between 0.1 and 8 K are reported. The Debye temperature and the density of electronics states at the Fermi surface are deduced from the lattice and electronic contributions, respectively. Some silicides have been found superconductors with small electron—phonon coupling constants. Emphasis is given to the comparison between the properties deduced from these studies and those obtained from the analysis of electrical transport data. The final part of this review is devoted to the calculation of some microscopic physical quantities, as for example the electron mean free path, the charge-carrier density, the Fermi velocity. The parameters of the best fit to the experimental resistivity curves, the free-carrier parameters obtained from infrared spectra and the density of electronic states at the Fermi surface determined from specific-heat measurements were used in such evaluations.</p></div>","PeriodicalId":100891,"journal":{"name":"Materials Science Reports","volume":"9 4","pages":"Pages 141-200"},"PeriodicalIF":0.0000,"publicationDate":"1993-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0920-2307(93)90007-2","citationCount":"77","resultStr":"{\"title\":\"Electrical and optical properties of silicide single crystals and thin films\",\"authors\":\"F. Nava ,&nbsp;K.N. Tu,&nbsp;O. Thomas,&nbsp;J.P. Senateur,&nbsp;R. Madar,&nbsp;A. Borghesi,&nbsp;G. Guizzetti,&nbsp;U. Gottlieb,&nbsp;O. Laborde,&nbsp;O. Bisi\",\"doi\":\"10.1016/0920-2307(93)90007-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Electrical transport and optical properties of transition-metal silicides are reviewed. They are integrated with thermal properties of single-crystal silicides. Most of these compounds behave as metals while some of them behave as semiconductors. The former show an increasing electrical resistivity ρ with increasing temperature. Several of them show a non-classical deviation of <em>ρ</em>(<em>T</em>) from linearity in the high-temperature limit. This deviation, related to intrinsic properties of the compound, can be affected both in sign and in amount by the presence of foreign atoms (impurities) and structural defects. Moreover, defects dominate the electrical transport at low temperatures both in metallic and semiconducting compounds. Therefore, the interpretation of the electrical properties measured as a function of temperature may give a non-realistic description of silicide intrinsic properties. Since also other physical properties, like thermal and optical ones, can be strongly affected by impurities and defects, results about single-crystal silicides will be first illustrated. Single-crystal preparation and structural characterization are described in detail, with emphasis on crystalline quality in terms of residual resistivity ratio. The electrical quantities, resistivity and magnetoresistance, are measured as a function of temperature and along the main crystallographic directions. The effect of impurities and defects on the transport properties is then evaluated by examining the electrical transport of polycrystalline thin-film silicides. The different contributions to the total resistivity are measured by changing: (i) film stoichiometry, (ii) impurity concentration, (iii) texture growth and (iv) film thickness. Hall-coefficient measurements are briefly discussed with the main purpose to evidence that great caution is necessary when deducing mobility and charge-carrier density values from these data. The theoretical models currently used to interpret the low- and high-temperature resistivity behavior of the metallic silicides are presented and used to fit the experimental resistivity curves. The results of these studies reveal that in several cases there are well-defined temperature ranges in which a specific electron—phonon scattering mechanism dominates. This allows a more detailed study of the microscopic processes. The optical functions from the far-infrared to the vacuum ultraviolet, derived from Kramers—Krönig analysis of reflectance spectra or directly measured by spectroscopic ellipsometry, are presented and discussed for some significant metallic disilicides, both single crystals and polycrystalline films. Different physical phenomena are distinguished in the spectra: intraband transitions at the lowest photon energies, interband transitions at higher energies, and collective oscillations. In particular, the free-carrier response derived from this analysis is compared with the transport results. The interpretation of the experimental spectra is based on the calculated electronic structures or optical functions. Moreover, it is shown how the optical studies contribute to assess definitively the semiconducting character of some disilicides. Specific-heat measurements on single crystals between 0.1 and 8 K are reported. The Debye temperature and the density of electronics states at the Fermi surface are deduced from the lattice and electronic contributions, respectively. Some silicides have been found superconductors with small electron—phonon coupling constants. Emphasis is given to the comparison between the properties deduced from these studies and those obtained from the analysis of electrical transport data. The final part of this review is devoted to the calculation of some microscopic physical quantities, as for example the electron mean free path, the charge-carrier density, the Fermi velocity. The parameters of the best fit to the experimental resistivity curves, the free-carrier parameters obtained from infrared spectra and the density of electronic states at the Fermi surface determined from specific-heat measurements were used in such evaluations.</p></div>\",\"PeriodicalId\":100891,\"journal\":{\"name\":\"Materials Science Reports\",\"volume\":\"9 4\",\"pages\":\"Pages 141-200\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0920-2307(93)90007-2\",\"citationCount\":\"77\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Science Reports\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0920230793900072\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science Reports","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0920230793900072","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 77

摘要

综述了过渡金属硅化物的电输运和光学性质。它们与单晶硅化物的热性能相结合。这些化合物中的大多数表现为金属,而其中一些表现为半导体。前者的电阻率ρ随温度升高而增大。其中一些在高温极限下显示出ρ(T)偏离线性的非经典偏差。这种偏差与化合物的固有性质有关,可以受到外来原子(杂质)和结构缺陷的存在的影响。此外,在金属和半导体化合物的低温下,缺陷主导着电输运。因此,将测量的电学性质解释为温度的函数可能会对硅化物的内在性质给出不现实的描述。由于其他物理性质,如热学和光学性质,也会受到杂质和缺陷的强烈影响,所以关于单晶硅化物的结果将首先得到说明。详细描述了单晶的制备和结构表征,重点介绍了剩余电阻率方面的晶体质量。电学量,电阻率和磁电阻,作为温度的函数,沿着主要的晶体学方向测量。然后通过检测多晶硅化薄膜的电输运来评估杂质和缺陷对输运性质的影响。对总电阻率的不同贡献是通过改变:(i)薄膜化学计量,(ii)杂质浓度,(iii)织构生长和(iv)薄膜厚度来测量的。简要讨论霍尔系数的测量,主要目的是证明从这些数据推断迁移率和载流子密度值时需要非常谨慎。提出了目前用于解释金属硅化物低温和高温电阻率行为的理论模型,并将其用于拟合实验电阻率曲线。这些研究的结果表明,在一些情况下,有明确的温度范围,其中特定的电子-声子散射机制占主导地位。这样就可以对微观过程进行更详细的研究。本文给出并讨论了一些重要的金属二硅酸盐单晶和多晶薄膜的远红外到真空紫外的光学函数,这些函数是由Kramers-Krönig反射光谱分析或椭偏光谱直接测量得到的。光谱中有不同的物理现象:最低光子能量的带内跃迁,高能量的带间跃迁和集体振荡。特别地,由该分析得到的自由载流子响应与输运结果进行了比较。实验光谱的解释是基于计算得到的电子结构或光学函数。此外,还说明了光学研究如何有助于确定地评价某些二硅酸盐的半导体特性。本文报道了单晶在0.1 ~ 8k之间的比热测量。德拜温度和费米表面的电子态密度分别由晶格和电子贡献推导出来。一些硅化物已被发现具有很小的电子-声子耦合常数的超导体。重点比较了这些研究所得的性质与电输运数据分析所得的性质。这篇综述的最后一部分致力于一些微观物理量的计算,例如电子平均自由程,载流子密度,费米速度。利用与实验电阻率曲线最拟合的参数、红外光谱得到的自由载流子参数和比热测量得到的费米表面电子态密度进行评价。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrical and optical properties of silicide single crystals and thin films

Electrical transport and optical properties of transition-metal silicides are reviewed. They are integrated with thermal properties of single-crystal silicides. Most of these compounds behave as metals while some of them behave as semiconductors. The former show an increasing electrical resistivity ρ with increasing temperature. Several of them show a non-classical deviation of ρ(T) from linearity in the high-temperature limit. This deviation, related to intrinsic properties of the compound, can be affected both in sign and in amount by the presence of foreign atoms (impurities) and structural defects. Moreover, defects dominate the electrical transport at low temperatures both in metallic and semiconducting compounds. Therefore, the interpretation of the electrical properties measured as a function of temperature may give a non-realistic description of silicide intrinsic properties. Since also other physical properties, like thermal and optical ones, can be strongly affected by impurities and defects, results about single-crystal silicides will be first illustrated. Single-crystal preparation and structural characterization are described in detail, with emphasis on crystalline quality in terms of residual resistivity ratio. The electrical quantities, resistivity and magnetoresistance, are measured as a function of temperature and along the main crystallographic directions. The effect of impurities and defects on the transport properties is then evaluated by examining the electrical transport of polycrystalline thin-film silicides. The different contributions to the total resistivity are measured by changing: (i) film stoichiometry, (ii) impurity concentration, (iii) texture growth and (iv) film thickness. Hall-coefficient measurements are briefly discussed with the main purpose to evidence that great caution is necessary when deducing mobility and charge-carrier density values from these data. The theoretical models currently used to interpret the low- and high-temperature resistivity behavior of the metallic silicides are presented and used to fit the experimental resistivity curves. The results of these studies reveal that in several cases there are well-defined temperature ranges in which a specific electron—phonon scattering mechanism dominates. This allows a more detailed study of the microscopic processes. The optical functions from the far-infrared to the vacuum ultraviolet, derived from Kramers—Krönig analysis of reflectance spectra or directly measured by spectroscopic ellipsometry, are presented and discussed for some significant metallic disilicides, both single crystals and polycrystalline films. Different physical phenomena are distinguished in the spectra: intraband transitions at the lowest photon energies, interband transitions at higher energies, and collective oscillations. In particular, the free-carrier response derived from this analysis is compared with the transport results. The interpretation of the experimental spectra is based on the calculated electronic structures or optical functions. Moreover, it is shown how the optical studies contribute to assess definitively the semiconducting character of some disilicides. Specific-heat measurements on single crystals between 0.1 and 8 K are reported. The Debye temperature and the density of electronics states at the Fermi surface are deduced from the lattice and electronic contributions, respectively. Some silicides have been found superconductors with small electron—phonon coupling constants. Emphasis is given to the comparison between the properties deduced from these studies and those obtained from the analysis of electrical transport data. The final part of this review is devoted to the calculation of some microscopic physical quantities, as for example the electron mean free path, the charge-carrier density, the Fermi velocity. The parameters of the best fit to the experimental resistivity curves, the free-carrier parameters obtained from infrared spectra and the density of electronic states at the Fermi surface determined from specific-heat measurements were used in such evaluations.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信