表面和边界形态学对薄膜结构Ge(001)和Si/Ge(001)中的纵向背景热传导的影响

А.Л. Хомец, Игорь Васильевич Сафронов, А Б Филонов, Д Б Мигас
{"title":"表面和边界形态学对薄膜结构Ge(001)和Si/Ge(001)中的纵向背景热传导的影响","authors":"А.Л. Хомец, Игорь Васильевич Сафронов, А Б Филонов, Д Б Мигас","doi":"10.21883/ftp.2023.03.55624.4742","DOIUrl":null,"url":null,"abstract":"In this work the method of non-equilibrium molecular dynamics was used to study the longitudinal phonon thermal transport at 300 K in nanoscale homogenous Ge(001) and lay- ered Si/Ge(001) thin films with p(2 × 1) surface reconstruction along different directions. The appearance of thermal transport anysotropy in the films under consideration, which is due to both the surface morphology and sharp Si/Ge interfaces, has been established. For the direction when the dimers and Si−Ge bonds at the interface lie in a plane parallel to the direction of the heat flow, the lowest thermal conductivity is observed (∼ 5−18 W/(m · K) in the range from ∼ 1 to 27 nm). It is shown that for films with thicknesses of more than 13 nm for all directions, layered films have a lower thermal conductivity compared to homogenous ones. In this case, the role of the surface morphology and interfaces is reduced to different degrees of phonon localization and compensation for more heat-conducting Si layers, respectively.","PeriodicalId":24054,"journal":{"name":"Физика и техника полупроводников","volume":"101 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Влияние морфологии поверхности и границ раздела на продольную фононную теплопроводность в тонкопленочных структурах Ge(001) и Si/Ge(001)\",\"authors\":\"А.Л. Хомец, Игорь Васильевич Сафронов, А Б Филонов, Д Б Мигас\",\"doi\":\"10.21883/ftp.2023.03.55624.4742\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work the method of non-equilibrium molecular dynamics was used to study the longitudinal phonon thermal transport at 300 K in nanoscale homogenous Ge(001) and lay- ered Si/Ge(001) thin films with p(2 × 1) surface reconstruction along different directions. The appearance of thermal transport anysotropy in the films under consideration, which is due to both the surface morphology and sharp Si/Ge interfaces, has been established. For the direction when the dimers and Si−Ge bonds at the interface lie in a plane parallel to the direction of the heat flow, the lowest thermal conductivity is observed (∼ 5−18 W/(m · K) in the range from ∼ 1 to 27 nm). It is shown that for films with thicknesses of more than 13 nm for all directions, layered films have a lower thermal conductivity compared to homogenous ones. In this case, the role of the surface morphology and interfaces is reduced to different degrees of phonon localization and compensation for more heat-conducting Si layers, respectively.\",\"PeriodicalId\":24054,\"journal\":{\"name\":\"Физика и техника полупроводников\",\"volume\":\"101 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Физика и техника полупроводников\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.21883/ftp.2023.03.55624.4742\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Физика и техника полупроводников","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21883/ftp.2023.03.55624.4742","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

本文采用非平衡分子动力学方法研究了不同方向p(2 × 1)表面重构的纳米级均匀Ge(001)和层状Si/Ge(001)薄膜在300 K下的纵向声子热输运。在考虑的薄膜中,由于表面形貌和尖锐的Si/Ge界面,热传递各向异性的出现已经确定。当二聚体和界面上的Si - Ge键处于与热流方向平行的平面时,在~ 1 ~ 27 nm范围内,观察到的导热系数最低(~ 5 ~ 18 W/(m·K))。结果表明,对于所有方向厚度均大于13 nm的薄膜,层状薄膜的导热系数比均质薄膜低。在这种情况下,表面形貌和界面的作用分别降低到不同程度的声子定位和对更多导热硅层的补偿。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Влияние морфологии поверхности и границ раздела на продольную фононную теплопроводность в тонкопленочных структурах Ge(001) и Si/Ge(001)
In this work the method of non-equilibrium molecular dynamics was used to study the longitudinal phonon thermal transport at 300 K in nanoscale homogenous Ge(001) and lay- ered Si/Ge(001) thin films with p(2 × 1) surface reconstruction along different directions. The appearance of thermal transport anysotropy in the films under consideration, which is due to both the surface morphology and sharp Si/Ge interfaces, has been established. For the direction when the dimers and Si−Ge bonds at the interface lie in a plane parallel to the direction of the heat flow, the lowest thermal conductivity is observed (∼ 5−18 W/(m · K) in the range from ∼ 1 to 27 nm). It is shown that for films with thicknesses of more than 13 nm for all directions, layered films have a lower thermal conductivity compared to homogenous ones. In this case, the role of the surface morphology and interfaces is reduced to different degrees of phonon localization and compensation for more heat-conducting Si layers, respectively.
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