导电溶胶-凝胶ZnO薄膜的合成及ZnO印刷电子的发展

D. Winarski, F. Selim
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引用次数: 3

摘要

合成并研究了ZnO薄膜,以了解溶液加工半导体器件的功能。采用简单的溶胶-凝胶技术,通过自旋涂层、喷墨打印和气溶胶喷射打印,从ZnO前驱体制备透明导电氧化物(tco)和紫外(UV)光电探测器。根据沉积和烧结条件以及器件的应用,选择了多种柔性和透明的衬底。在沉积前,在前驱体溶液中掺杂Al 3+、In 3+和Ga 3+。在空气、h2和Zn环境下进行后处理,以优化薄膜的性能。光学、结构和电子数据分析揭示了沉积方法、衬底、掺杂剂和加工条件对光学透射率、结晶度、晶粒尺寸和电导率的重要影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis of Conductive Sol-Gel ZnO Films and Development of ZnO Printed Electronics
ZnO thin films are synthesized and studied to understand the functionality of solu - tion-processed semiconductor devices. A simple sol-gel technique is used to fabricate transparent conductive oxides (TCOs) and ultraviolet (UV) photodetectors from ZnO precursors via spin coating, inkjet printing (IJP), and aerosol jet printing (AJP). A variety of flexible and transparent substrates was selected based on the deposition and sintering conditions and the device application. Doping of ZnO films with Al 3+ , In 3+ , and Ga 3+ was introduced in precursor solutions before deposition processes. Post-deposition process - ing was carried out in air, H 2 , and Zn environments to optimize thin film properties. Optical, structural, and electronic data analyses reveal the significant effects that deposi - tion method, substrates, dopants, and processing conditions have on the optical trans -mission, crystallinity, grain size, and electrical conductivity.
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