Umidjon Nurmetov, Tobias Fritz, Ernst Müllner, Christopher M. Dougherty, F. Kreupl, R. Brederlow
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A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution
An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and < 1LSB error over temperature from 5°C to 90°C. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensation.
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