基于环形辅助马赫-曾德尔干涉仪的高灵敏度硅光学折射率传感器

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-08-01 DOI:10.1109/OMN.2013.6659093

Tian-ling Zhang, Bo Li, C. Ho, Chengkuo Lee

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引用次数: 1

摘要

本文介绍了基于环形辅助马赫-曾德尔干涉仪(RA-MZI)光学传感器的设计与制作。测量结果表明，自由光谱范围(FSR)为5 nm，最高q因子为2000。时域有限差分(FDTD)仿真结果表明，该传感器对环境折射率变化的感知灵敏度为137.5 nm/RIU。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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High sensitive silicon optical index sensor based on Ring-assisted Mach-Zehnder interferometer

This paper demonstrated the design and fabrication of Ring-assisted Mach-Zehnder interferometer (RA-MZI) based optical sensor. The measurement result shows a free spectrum range (FSR) of 5 nm and a highest Q-factor of 2000. Finite difference time domain (FDTD) simulation result shows a sensitivity of 137.5 nm/RIU for sensing ambient refractive index (RI) change.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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