{"title":"周期性倒转AlGaAs波导生长过程中Ga和Al原子各向异性扩散的影响","authors":"T. Matsushita, S. Yoshida, J. Ota, T. Kondo","doi":"10.1364/CLEO_SI.2012.CTH3D.3","DOIUrl":null,"url":null,"abstract":"We have investigated a quasi-phase-matching AlGaAs waveguide using cathodoluminescence spectroscopy and atomic force microscopy. We found that the anisotropic diffusion of Al/Ga atoms causes Al-composition modulation as well as interface corrugations.","PeriodicalId":6442,"journal":{"name":"2012 Conference on Lasers and Electro-Optics (CLEO)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2012-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of anisotropic diffusion of Ga and Al atoms during AlGaAs growth for periodically-inverted AlGaAs waveguides\",\"authors\":\"T. Matsushita, S. Yoshida, J. Ota, T. Kondo\",\"doi\":\"10.1364/CLEO_SI.2012.CTH3D.3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have investigated a quasi-phase-matching AlGaAs waveguide using cathodoluminescence spectroscopy and atomic force microscopy. We found that the anisotropic diffusion of Al/Ga atoms causes Al-composition modulation as well as interface corrugations.\",\"PeriodicalId\":6442,\"journal\":{\"name\":\"2012 Conference on Lasers and Electro-Optics (CLEO)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 Conference on Lasers and Electro-Optics (CLEO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/CLEO_SI.2012.CTH3D.3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 Conference on Lasers and Electro-Optics (CLEO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEO_SI.2012.CTH3D.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Influence of anisotropic diffusion of Ga and Al atoms during AlGaAs growth for periodically-inverted AlGaAs waveguides
We have investigated a quasi-phase-matching AlGaAs waveguide using cathodoluminescence spectroscopy and atomic force microscopy. We found that the anisotropic diffusion of Al/Ga atoms causes Al-composition modulation as well as interface corrugations.
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