MCVD过程的热泳效率:CFD模型

Netcom Pub Date : 2023-07-30 DOI:10.1109/OMN/SBFotonIOPC58971.2023.10230917

R. C. Da Silva, Paulo Jorge Duda De Morais, Andre Carvalho, Wagner De Rossi, C. Motta

{"title":"MCVD过程的热泳效率:CFD模型","authors":"R. C. Da Silva, Paulo Jorge Duda De Morais, Andre Carvalho, Wagner De Rossi, C. Motta","doi":"10.1109/OMN/SBFotonIOPC58971.2023.10230917","DOIUrl":null,"url":null,"abstract":"The thermophoretic efficiency in the modified chemical vapour deposition (MCVD) process has been numerically determined under specified conditions of temperature and velocity field in the silica deposition tube. A CFD code was used to solve a steady-state numerical model of the MCVD process. The cumulative efficiency of $\\text{SiO}_{2}$ and $\\text{GeO}_{2}$ deposition was calculated along the tube length, yielding to a maximum value of 42% and 37 % respectivelly.","PeriodicalId":31141,"journal":{"name":"Netcom","volume":"21 1","pages":"01-02"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thermophoretic Efficiency in the MCVD Process: A CFD Modeling\",\"authors\":\"R. C. Da Silva, Paulo Jorge Duda De Morais, Andre Carvalho, Wagner De Rossi, C. Motta\",\"doi\":\"10.1109/OMN/SBFotonIOPC58971.2023.10230917\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The thermophoretic efficiency in the modified chemical vapour deposition (MCVD) process has been numerically determined under specified conditions of temperature and velocity field in the silica deposition tube. A CFD code was used to solve a steady-state numerical model of the MCVD process. The cumulative efficiency of $\\\\text{SiO}_{2}$ and $\\\\text{GeO}_{2}$ deposition was calculated along the tube length, yielding to a maximum value of 42% and 37 % respectivelly.\",\"PeriodicalId\":31141,\"journal\":{\"name\":\"Netcom\",\"volume\":\"21 1\",\"pages\":\"01-02\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Netcom\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230917\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Netcom","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230917","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

在一定的温度场和速度场条件下，对改性化学气相沉积(MCVD)工艺的热电泳效率进行了数值计算。利用CFD程序对MCVD过程的稳态数值模型进行了求解。沿管长方向计算$\text{SiO}_{2}$和$\text{GeO}_{2}$沉积的累积效率，最大值分别为42%和37%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Thermophoretic Efficiency in the MCVD Process: A CFD Modeling

The thermophoretic efficiency in the modified chemical vapour deposition (MCVD) process has been numerically determined under specified conditions of temperature and velocity field in the silica deposition tube. A CFD code was used to solve a steady-state numerical model of the MCVD process. The cumulative efficiency of $\text{SiO}_{2}$ and $\text{GeO}_{2}$ deposition was calculated along the tube length, yielding to a maximum value of 42% and 37 % respectivelly.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Netcom

自引率

0.00%

发文量

审稿时长

18 weeks