不同层数Mn1.56Co0.96Ni0.48O4薄膜的红外椭偏光谱分析

2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz) Pub Date : 2015-11-12 DOI:10.1109/IRMMW-THZ.2015.7327441

Yanqing Gao, Zhiming Huang, Y. Hou, Jing Wu, Wei Zhou, C. Ouyang, J. Chu

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引用次数: 0

摘要

在Pt//Ti/SiO2/Si衬底上制备了不同层数的Mn1.56Co0.96Ni0.48O4薄膜。利用红外光谱椭偏法研究了薄膜的红外光学性能。利用经典红外模型对实测椭偏参数数据进行拟合，得到了光学常数。

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Infrared ellipsometric spectroscopy of Mn1.56Co0.96Ni0.48O4 thin films with different layers

High quality Mn_1.56Co_0.96Ni_0.48O₄ films with different layers have been prepared on Pt//Ti/SiO₂/Si substrate. Infrared optical properties of the films have been investigated using infrared spectroscopic ellipsometry. The optical constants have been obtained by fitting the measured ellipsometric parameter data with classical infrared model.

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2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz)

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