激光生成saw对低k薄膜的杨氏模量检测

Ya-liang Liu, X. Xiao, X. Shan, S. Fu
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引用次数: 1

摘要

激光的进步为探测领域开辟了新的可能性。激光产生表面声波(LSAWs)技术是激光的应用之一。根据热弹性理论,当激光脉冲照射到样品表面时,表面声波可以通过快速加热和随后的表面层膨胀产生。通过对声表面波波形的测试和分析,可以获得丰富的样品表面信息。当波在层状薄膜结构上传播时,saw具有弥散性。通过将实验色散曲线与理论色散曲线进行匹配,可以准确、方便地确定薄膜的杨氏模量。建立了一种实验系统,用LSAWs的方法检测沉积在硅(100)衬底上的低k薄膜的E值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Young's Modulus Detection for the Low-k Film by Laser-Generated SAWs
Advances of laser have opened new possibilities in the field of detection. The technology of laser-generated surface acoustic waves (LSAWs) is one of the applications of laser. According to the thermal-elastic theory, surface acoustic waves (SAWs) could be generated through rapid heating and subsequent expansion of the surface layer when the laser pulse irradiates on the surface of sample. The abundant information of sample surface could be obtained by testing and analyzing the SAW waveforms. The SAWs are dispersive when the waves propagate on the layered film structure. The Young's Modulus (E) of the film can be determined accurately and conveniently by matching the experimental dispersion curve with the theoretical curves. An experimental system is constructed to detect the E value of a low-k film which is deposited on the silicon (100) substrate by the method of LSAWs.
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