应变控制石墨烯型高灵敏度气体传感器的研制

Xiangyu Qiao, Qinqiang Zhang, Ken Suzuki
{"title":"应变控制石墨烯型高灵敏度气体传感器的研制","authors":"Xiangyu Qiao, Qinqiang Zhang, Ken Suzuki","doi":"10.1115/IMECE2020-23581","DOIUrl":null,"url":null,"abstract":"\n Small-size wearable multi-gas sensor with high selectivity and sensitivity is demanded for detecting various harmful gases with high sensitivity in chemical plants, various mines, volcanos, oil and gas fields. Graphene is considered to be the most promising gas-sensitive material due to its large specific surface area and high electron mobility. Many studies have shown that it has a high sensitivity to many gases such as NH3, CO, NO2, H2O, and so on. However, the lack of gas selectivity limits the further application of graphene to gas sensing field. In this study, a first-principle calculation was used to investigate the effect of strain on the gas adsorption behavior of graphene. As a result, it was found that the adsorption behavior of H2O and CO molecules was changed by strain. The adsorption energy of both gases increased monotonically with strain. For carbon monoxide molecules, desorption occurred when the applied tensile strain reached about 5%. These analytical results clearly indicated that there is a possibility of the high selectivity of plural gases by applying appropriate critical strain at which its adsorption changes to desorption. To verify this result, the strain-controlled sensor using graphene was developed. The sensor is composed of graphene and electrodes mounted on a deformable substrate. The high-quality graphene is synthesized on copper by LPCVD (low pressure chemical vapor deposition), and then transferred to the PDMS (Polydimethylsiloxane) substrate using PMMA (Poly methyl methacrylate) as a support layer. It was found that the graphene was monolayer and successfully transferred to the target substrate. The effect of strain on the adsorption of some gases was validated by measuring the change of the resistivity of graphene under the application of uniaxial strain.","PeriodicalId":23837,"journal":{"name":"Volume 3: Advanced Materials: Design, Processing, Characterization, and Applications","volume":"175 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Development of a Strain-Controlled Graphene-Based Highly Sensitive Gas Sensor\",\"authors\":\"Xiangyu Qiao, Qinqiang Zhang, Ken Suzuki\",\"doi\":\"10.1115/IMECE2020-23581\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n Small-size wearable multi-gas sensor with high selectivity and sensitivity is demanded for detecting various harmful gases with high sensitivity in chemical plants, various mines, volcanos, oil and gas fields. Graphene is considered to be the most promising gas-sensitive material due to its large specific surface area and high electron mobility. Many studies have shown that it has a high sensitivity to many gases such as NH3, CO, NO2, H2O, and so on. However, the lack of gas selectivity limits the further application of graphene to gas sensing field. In this study, a first-principle calculation was used to investigate the effect of strain on the gas adsorption behavior of graphene. As a result, it was found that the adsorption behavior of H2O and CO molecules was changed by strain. The adsorption energy of both gases increased monotonically with strain. For carbon monoxide molecules, desorption occurred when the applied tensile strain reached about 5%. These analytical results clearly indicated that there is a possibility of the high selectivity of plural gases by applying appropriate critical strain at which its adsorption changes to desorption. To verify this result, the strain-controlled sensor using graphene was developed. The sensor is composed of graphene and electrodes mounted on a deformable substrate. The high-quality graphene is synthesized on copper by LPCVD (low pressure chemical vapor deposition), and then transferred to the PDMS (Polydimethylsiloxane) substrate using PMMA (Poly methyl methacrylate) as a support layer. It was found that the graphene was monolayer and successfully transferred to the target substrate. The effect of strain on the adsorption of some gases was validated by measuring the change of the resistivity of graphene under the application of uniaxial strain.\",\"PeriodicalId\":23837,\"journal\":{\"name\":\"Volume 3: Advanced Materials: Design, Processing, Characterization, and Applications\",\"volume\":\"175 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-11-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Volume 3: Advanced Materials: Design, Processing, Characterization, and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1115/IMECE2020-23581\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Volume 3: Advanced Materials: Design, Processing, Characterization, and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1115/IMECE2020-23581","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

化工厂、各种矿山、火山、油气田等需要高灵敏度检测各种有害气体,需要小尺寸、高选择性、高灵敏度的可穿戴式多气体传感器。石墨烯由于其大的比表面积和高的电子迁移率被认为是最有前途的气敏材料。许多研究表明,它对许多气体如NH3、CO、NO2、H2O等都有很高的灵敏度。然而,缺乏气体选择性限制了石墨烯在气敏领域的进一步应用。在本研究中,采用第一性原理计算来研究应变对石墨烯气体吸附行为的影响。结果发现,应变改变了H2O和CO分子的吸附行为。两种气体的吸附能随应变单调增加。对于一氧化碳分子,当施加的拉伸应变达到约5%时发生解吸。这些分析结果清楚地表明,施加适当的临界应变,使其吸附转变为脱附,就有可能使多种气体具有高选择性。为了验证这一结果,开发了石墨烯应变控制传感器。该传感器由石墨烯和安装在可变形基板上的电极组成。采用LPCVD(低压化学气相沉积)技术在铜上合成了高质量的石墨烯,然后以PMMA(聚甲基丙烯酸甲酯)作为支撑层转移到PDMS(聚二甲基硅氧烷)衬底上。发现石墨烯是单层的,并成功地转移到目标衬底上。通过测量单轴应变作用下石墨烯电阻率的变化,验证了应变对某些气体吸附的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of a Strain-Controlled Graphene-Based Highly Sensitive Gas Sensor
Small-size wearable multi-gas sensor with high selectivity and sensitivity is demanded for detecting various harmful gases with high sensitivity in chemical plants, various mines, volcanos, oil and gas fields. Graphene is considered to be the most promising gas-sensitive material due to its large specific surface area and high electron mobility. Many studies have shown that it has a high sensitivity to many gases such as NH3, CO, NO2, H2O, and so on. However, the lack of gas selectivity limits the further application of graphene to gas sensing field. In this study, a first-principle calculation was used to investigate the effect of strain on the gas adsorption behavior of graphene. As a result, it was found that the adsorption behavior of H2O and CO molecules was changed by strain. The adsorption energy of both gases increased monotonically with strain. For carbon monoxide molecules, desorption occurred when the applied tensile strain reached about 5%. These analytical results clearly indicated that there is a possibility of the high selectivity of plural gases by applying appropriate critical strain at which its adsorption changes to desorption. To verify this result, the strain-controlled sensor using graphene was developed. The sensor is composed of graphene and electrodes mounted on a deformable substrate. The high-quality graphene is synthesized on copper by LPCVD (low pressure chemical vapor deposition), and then transferred to the PDMS (Polydimethylsiloxane) substrate using PMMA (Poly methyl methacrylate) as a support layer. It was found that the graphene was monolayer and successfully transferred to the target substrate. The effect of strain on the adsorption of some gases was validated by measuring the change of the resistivity of graphene under the application of uniaxial strain.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信