模拟固态扩散键合

A. Hill , E.R. Wallach
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引用次数: 192

摘要

在过去的15年里,随着扩散键合作为一种商业工艺的使用越来越多,一系列越来越复杂的尝试也在同步进行,以模拟键合过程中发生的机制和过程。本文描述了扩散键合的理论模型,提出了一种新的、简化的孔洞几何结构。在扩散键合过程中运行的机制是基于压力烧结研究得出的机制,尽管这些机制的驱动力和速率项已经改变,以允许两个过程的完全不同的几何形状。这项工作还包括对晶粒尺寸影响的分析,晶粒尺寸可以导致额外晶界扩散对键合的贡献增强,因此在连接细晶粒尺寸的材料时可能特别相关。讨论了这个新模型在多大程度上比现有模型提供了重大的发展;实验结果与新模型预测结果的初步比较表明,理论与实践有较好的一致性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modelling solid-state diffusion bonding

The increasing use of diffusion bonding as a commercial process has, over the last 15 years, been paralleled by a series of progressively more complex attempts to model the mechanisms and processes occurring during bonding. This paper describes a theoretical model for diffusion bonding which proposes a new and simplified void geometry. The mechanisms operating during diffusion bonding are based on those derived from pressure sintering studies, although the driving forces and rate terms for these mechanisms have been altered to allow for the quite different geometries of the two processes. Also included in this work is an analysis of the effect of grain size which can lead to an enhancement in the contribution to bonding from additional grain boundary diffusion and so may be particularly relevant when joining materials of fine grain size. The extent to which this new model offers significant developments over existing models is discussed; an initial comparison between experimental results and predictions from this new model shows that there is good agreement between practice and theory.

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