M. Bianki, Régis Guertin, C. Lemieux-Leduc, Y. Peter
{"title":"用于环境传感器的喷墨印刷光学谐振器的研究","authors":"M. Bianki, Régis Guertin, C. Lemieux-Leduc, Y. Peter","doi":"10.1109/OMN/SBFotonIOPC58971.2023.10230943","DOIUrl":null,"url":null,"abstract":"We investigated an inkjet-printed polymer optical resonator as an environmental sensor. The fabrication method combines additive manufacturing and microfabrication techniques to obtain a suspended SU-8 microdroplet on a silicon pillar. Sensitivity for temperature (−41.4 pm/°C) and humidity sensitivity (0.22 pm/ppm) are measured.","PeriodicalId":31141,"journal":{"name":"Netcom","volume":"27 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of an Inkjet Printed Optical Resonator as an Environmental Sensor\",\"authors\":\"M. Bianki, Régis Guertin, C. Lemieux-Leduc, Y. Peter\",\"doi\":\"10.1109/OMN/SBFotonIOPC58971.2023.10230943\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We investigated an inkjet-printed polymer optical resonator as an environmental sensor. The fabrication method combines additive manufacturing and microfabrication techniques to obtain a suspended SU-8 microdroplet on a silicon pillar. Sensitivity for temperature (−41.4 pm/°C) and humidity sensitivity (0.22 pm/ppm) are measured.\",\"PeriodicalId\":31141,\"journal\":{\"name\":\"Netcom\",\"volume\":\"27 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Netcom\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230943\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Netcom","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN/SBFotonIOPC58971.2023.10230943","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigation of an Inkjet Printed Optical Resonator as an Environmental Sensor
We investigated an inkjet-printed polymer optical resonator as an environmental sensor. The fabrication method combines additive manufacturing and microfabrication techniques to obtain a suspended SU-8 microdroplet on a silicon pillar. Sensitivity for temperature (−41.4 pm/°C) and humidity sensitivity (0.22 pm/ppm) are measured.
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