钾化场效应晶体管光固化传感膜的比较研究

2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2015-12-17 DOI:10.1109/RSM.2015.7354959

N. A. Rashid, M. Noor, Z. M. Yusof

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引用次数: 0

摘要

国内微电子制造技术的发展为基于场效应晶体管(FET)的化学传感器的发展提供了契机。开发了沉积在FET器件上的化学传感材料，以探索化学敏感场效应晶体管(ChemFET)的功能，用于农业和水产养殖应用中的特定分析物的检测。本文采用光固化的方法制备了用于钾化场效应晶体管(K ChemFET)传感器的传感膜。选择以聚氨酯和丙烯酸酯为主体基质的聚合物作为钾离子检测膜进行对比研究。根据传感器的灵敏度和选择性对其性能进行了表征。使用两种膜类型对K ChemFET传感器进行性能测试，结果与商用K传感器相当，在10-4至10-1 M校准溶液范围内，灵敏度接近enernstian值，线性度(> 0.99)良好。对Na+、Ca2+和Mg2+干扰离子的选择性测试表明，K丙烯酸酯基ChemFET的选择性比K聚氨酯基ChemFET高1倍。

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A comparative study of photocurable sensing membrane for Potassium ChemFET sensor

The availability of in-house microelectronic fabrication technology has given an opportunity for the development of chemical sensor based on field effect transistor (FET). Chemical sensing material deposited on the FET device is developed to explore the function as chemically sensitive field effect transistor (ChemFET) for the detection of specific analyte for agriculture and aquaculture applications. In this work, photocurable method was used to develop sensing membrane for Potassium ChemFET (K ChemFET) sensor. Urethane- and Acrylate-based host matrix polymer was selected for a comparative study as a sensing membrane for potassium ion detection. The performance of the sensor was characterized according to its sensitivity and selectivity. Performance test for K ChemFET sensor using both membrane types showed a comparable result with commercial K sensor with sensitivity of near Nernstian value and good linearity (> 0.99) in the range of 10-4 to 10-1 M calibration solution. Selectivity test demonstrated that K Acrylate-based ChemFET with one fold higher than K Urethane-based ChemFET towards Na+, Ca2+ and Mg2+ interfering ions.

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2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)

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