Structure and kinetics of the crystallization of oxide films, deposited by laser ablation

It was investigated the kinetics of the electron beam crystallization of amorphous films, deposited with laser sputtering of metals (V, Cr, Hf, Zr) in an oxygen atmosphere. We used methods of electron diffraction and transmission electron microscopy with video recording “in situ” of fast-flowing processes of phase transformations. We have experimentally confirmed the applicability of the method of classification of the crystallization reaction of amorphous films, which is based on structural and morphological principles.