波长调谐干涉法测量透明板的精密表面形状

{"title":"波长调谐干涉法测量透明板的精密表面形状","authors":"Hwan Kim, Ju-Seob Jeon, Yangjin Kim","doi":"10.3795/ksme-a.2023.47.4.331","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":23293,"journal":{"name":"Transactions of The Korean Society of Mechanical Engineers A","volume":null,"pages":null},"PeriodicalIF":0.2000,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Precision Surface Shape Measurement of Transparent Plate Using Wavelength- Tuning Interferometry\",\"authors\":\"Hwan Kim, Ju-Seob Jeon, Yangjin Kim\",\"doi\":\"10.3795/ksme-a.2023.47.4.331\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":23293,\"journal\":{\"name\":\"Transactions of The Korean Society of Mechanical Engineers A\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.2000,\"publicationDate\":\"2023-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Transactions of The Korean Society of Mechanical Engineers A\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3795/ksme-a.2023.47.4.331\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, MECHANICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Transactions of The Korean Society of Mechanical Engineers A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3795/ksme-a.2023.47.4.331","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}