激光波长和脉冲数对脉冲激光沉积氧化铋薄膜结构和光学性能的影响

2014 International Semiconductor Conference (CAS) Pub Date : 2014-10-01 DOI:10.1109/SMICND.2014.6966400

S. Condurache-Bota, C. Constantinescu, M. Praisler, V. Tiron, N. Țigău, C. Gheorghieș

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引用次数: 2

摘要

脉冲激光沉积(PLD)通过在烧蚀室中使用纯铋靶和氧气气氛，成功地制备了氧化铋薄膜。本文证明了激光脉冲的波长和脉冲数对薄膜的结构、形貌和光学性能有很大的影响。

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The influence of laser wavelength and pulses number on the structure and the optical properties of pulsed laser-deposited bismuth oxide thin films

Pulsed laser deposition (PLD) proves to be successful for the preparation of bismuth oxide films, by using pure bismuth targets and oxygen atmosphere inside the ablation chamber. This paper proves that the wavelength and the number of laser pulses strongly influence the structure, morphology and optical properties of the films.

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2014 International Semiconductor Conference (CAS)

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