使用超高近场同轴尖端制造和测量

IEEE MTT-S International Microwave Symposium Digest, 2005. Pub Date : 2005-06-12 DOI:10.1109/MWSYM.2005.1517174

Yaqiang Wang, C. A. Paulson, Guoqing Ning, D. W. van der Weide

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引用次数: 0

摘要

提出了一种高度>50 /spl mu/m的同轴硅尖端微加工新方法。同轴硅尖端作为一个电子小天线。用HP8753D网络分析仪和原子力显微镜(AFM)对微加工同轴尖端芯片进行微波测量。以非接触模式的商用AFM硅探针为样本，演示了超高同轴探针扫描近场微波显微镜(SNMM)。

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Fabrication and measurements using ultra-tall near-field coaxial tips

We present a new method for microfabrication of coaxial silicon tips with heights >50 /spl mu/m. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.

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IEEE MTT-S International Microwave Symposium Digest, 2005.

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