Internal structure and electrical properties of Ge quantum dot in single-electron transistors

We have developed a simple, manageable, and self-organized manner — thermally oxidizing SiGe nanocavity for precisely controlling Ge quantum dot (QD) number, position, and tunnel path, which is crucial for effective single-electron tunneling devices. The internal structure properties of Ge QDs were systematically characterized. The effectiveness of Ge QD placement is evidenced by high performance Ge QD single electron transistors (SETs), featuring with clear Coulomb staircase and Coulomb-blockade oscillation behaviors at room temperature.