{"title":"梯度层状涂层的组成与结构:掺杂氮化钛-分散强化非晶碳","authors":"S. Ovchinnikov, V. A. Slabodchikov, V. Kuznetsov","doi":"10.1063/1.5132125","DOIUrl":null,"url":null,"abstract":"By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.","PeriodicalId":20637,"journal":{"name":"PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS WITH HIERARCHICAL STRUCTURE FOR NEW TECHNOLOGIES AND RELIABLE STRUCTURES 2019","volume":"8 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The composition and structure of gradient layered coatings: Doped titanium nitride – Dispersion strengthened amorphous carbon\",\"authors\":\"S. Ovchinnikov, V. A. Slabodchikov, V. Kuznetsov\",\"doi\":\"10.1063/1.5132125\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.\",\"PeriodicalId\":20637,\"journal\":{\"name\":\"PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS WITH HIERARCHICAL STRUCTURE FOR NEW TECHNOLOGIES AND RELIABLE STRUCTURES 2019\",\"volume\":\"8 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-11-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS WITH HIERARCHICAL STRUCTURE FOR NEW TECHNOLOGIES AND RELIABLE STRUCTURES 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1063/1.5132125\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS WITH HIERARCHICAL STRUCTURE FOR NEW TECHNOLOGIES AND RELIABLE STRUCTURES 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1063/1.5132125","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The composition and structure of gradient layered coatings: Doped titanium nitride – Dispersion strengthened amorphous carbon
By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.By changing deposition conditions using the method of plasma assisted magnetron sputtering the authors produced gradient layered coatings of the (Ti,Al,Si,Cu)N-TiC/a-C. Using transmission electron microscopy and X-ray microanalysis, changes in elemental and phase compositions, as well as in the structure of different layers were established. Local stresses at different scales and thicknesses of an amorphous grain-boundary (for TiC crystals) carbon phase were estimated.