浸涂法制备ZnO/Al薄膜及其性能

I. Juhņeviča, Marija Mašonkina, G. Mežinskis, Aļona Gabrene
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引用次数: 13

摘要

本文采用溶胶-凝胶浸包法制备了ZnO和ZnO/Al薄膜。研究了退火制度和掺杂剂浓度对ZnO和铝掺杂ZnO (ZnO/Al)薄膜结构性能的影响。采用原子力显微镜和x射线衍射分别测定了ZnO薄膜的表面形貌和结晶度。实验结果表明,在“激波”条件下制备的ZnO和ZnO/Al薄膜表面光滑,晶粒均匀。铝浓度的增加使膜的晶粒尺寸减小,膜的密度增大。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis and Properties of ZnO/Al Thin Films Prepared by Dip-Coating Process
In this work sol–gel dip-coating technique was used to synthesize ZnO and ZnO/Al films. The influence of annealing regime and dopant concentration on the structural properties of ZnO and aluminum doped ZnO (ZnO/Al) films was investigated. The surface morphology and crystallinity of ZnO films were determined using atomic force microscopy and Xray diffraction, respectively. The experimental results show that ZnO and ZnO/Al films prepared using “shock” conditions have smooth surfaces and uniform grains. Increase of aluminum concentration led to grain size reduction and denser film.
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