柔性电子用各向异性导电薄膜(Acfs)材料的片内芯片(CIF)封装动态弯曲可靠性研究

Seung-Yoon Jung, K. Paik
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引用次数: 1

摘要

在这项研究中,柔性晶片-织物(CIF)组件采用各向异性导电薄膜(ACFs)和覆盖层结构。织物衬底采用Cu图案层压方法,在层压到织物上之前附加化学镀镍浸金(ENIG)金属表面处理。采用热压缩(T/C)键合方法,将$50\ \mu\ mathm {m}$厚的Si芯片用ACFs键合在织物衬底上。T/C键合后,芯片与衬底之间形成稳定的ACFs连接互连。采用聚合物覆盖层结构后,切屑开裂前的最小弯曲半径急剧减小至10 mm半径。此外,还进行了动态弯曲试验,评估了CIF组件的动态弯曲可靠性,并采用截面SEM分析和数字图像相关(DIC)方法对弯曲试验结果进行了分析。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Study on the Dynamic Bending Reliability of Chip-in-Fabrics(CIF) Packages Using Anisotropic Conductive Films (Acfs) Materials For Flexible Electronic Applications
In this study, flexible Chip-In-Fabric (CIF) assemblies using anisotropic conductive films (ACFs) and cover layer structure were demonstrated. Fabric substrates were fabricated by Cu pattern lamination method with additional Electroless Nickel Immersion Gold (ENIG) metal finish before laminating onto the fabrics. Thermo-compression (T/C) bonding method was used to bond the $50\ \mu\mathrm{m}$-thick Si chip on the fabric substrates using ACFs. After T/C bonding, stable ACFs joint interconnection was formed between chips and substrates. After polymer cover layer structure was applied, the minimum bending radius before chip crack drastically decreased down to 10 mm radius. In addition, a dynamic bending test was performed to evaluate the dynamic bending reliability of the CIF assemblies, and cross-section SEM analysis and digital image correlation (DIC) method were used to analyze the bending test results.
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