{"title":"不同掺杂剂对ZnO薄膜性能的影响","authors":"P Nunes , E Fortunato , P Vilarinho , R Martins","doi":"10.1016/S1466-6049(01)00129-5","DOIUrl":null,"url":null,"abstract":"<div><p><span><span><span>The influence of doping on the properties of zinc oxide thin films deposited by </span>spray pyrolysis has been studied. The results show that the doping affects the properties of the films, mainly the electrical ones, function of its concentration and nature. The most significative improvement were observed for films doped with 1 at.% of </span>indium exhibiting a resistivity of 1.9×10</span><sup>−1</sup> Ω<!--> <!-->m associated to a transmittance of 86%, characteristics required for applications on the optoelectronic devices.</p></div>","PeriodicalId":100700,"journal":{"name":"International Journal of Inorganic Materials","volume":"3 8","pages":"Pages 1211-1213"},"PeriodicalIF":0.0000,"publicationDate":"2001-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S1466-6049(01)00129-5","citationCount":"19","resultStr":"{\"title\":\"Effect of different dopants on the properties of ZnO thin films\",\"authors\":\"P Nunes , E Fortunato , P Vilarinho , R Martins\",\"doi\":\"10.1016/S1466-6049(01)00129-5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p><span><span><span>The influence of doping on the properties of zinc oxide thin films deposited by </span>spray pyrolysis has been studied. The results show that the doping affects the properties of the films, mainly the electrical ones, function of its concentration and nature. The most significative improvement were observed for films doped with 1 at.% of </span>indium exhibiting a resistivity of 1.9×10</span><sup>−1</sup> Ω<!--> <!-->m associated to a transmittance of 86%, characteristics required for applications on the optoelectronic devices.</p></div>\",\"PeriodicalId\":100700,\"journal\":{\"name\":\"International Journal of Inorganic Materials\",\"volume\":\"3 8\",\"pages\":\"Pages 1211-1213\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/S1466-6049(01)00129-5\",\"citationCount\":\"19\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Inorganic Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1466604901001295\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Inorganic Materials","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1466604901001295","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effect of different dopants on the properties of ZnO thin films
The influence of doping on the properties of zinc oxide thin films deposited by spray pyrolysis has been studied. The results show that the doping affects the properties of the films, mainly the electrical ones, function of its concentration and nature. The most significative improvement were observed for films doped with 1 at.% of indium exhibiting a resistivity of 1.9×10−1 Ω m associated to a transmittance of 86%, characteristics required for applications on the optoelectronic devices.
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