界面散射对多晶Au/Pd多层薄膜电阻的影响

J. Vries, F. D. Broeder
{"title":"界面散射对多晶Au/Pd多层薄膜电阻的影响","authors":"J. Vries, F. D. Broeder","doi":"10.1088/0305-4608/18/12/014","DOIUrl":null,"url":null,"abstract":"The resistivity of Au/Pd multilayered thin films, obtained with high-vacuum evaporation, with layer periodicities from 2.34 nm to 23.0 nm is studied as a function of temperature between 4.2 and 300 K. Chemical analysis X-ray diffraction, electron diffraction and transmission electron microscopy served to determine the composition and microstructure of the samples. The scattering contribution of the Au/Pd interfaces was estimated by taking into account the resistivity increase resulting from grain-boundary scattering. Two series of films were investigated, one with alternate Au and Pd layers of equal thickness and the other with constant Au layer thickness and increasing Pd layer thickness. In both series the same value for the interface scattering at the Au/Pd interfaces was found. The results were found to agree reasonably with previous results obtained on Au films.","PeriodicalId":16828,"journal":{"name":"Journal of Physics F: Metal Physics","volume":"47 1","pages":"2635-2647"},"PeriodicalIF":0.0000,"publicationDate":"1988-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"20","resultStr":"{\"title\":\"Influence of interface scattering on the resistance of polycrystalline Au/Pd multilayered thin films\",\"authors\":\"J. Vries, F. D. Broeder\",\"doi\":\"10.1088/0305-4608/18/12/014\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The resistivity of Au/Pd multilayered thin films, obtained with high-vacuum evaporation, with layer periodicities from 2.34 nm to 23.0 nm is studied as a function of temperature between 4.2 and 300 K. Chemical analysis X-ray diffraction, electron diffraction and transmission electron microscopy served to determine the composition and microstructure of the samples. The scattering contribution of the Au/Pd interfaces was estimated by taking into account the resistivity increase resulting from grain-boundary scattering. Two series of films were investigated, one with alternate Au and Pd layers of equal thickness and the other with constant Au layer thickness and increasing Pd layer thickness. In both series the same value for the interface scattering at the Au/Pd interfaces was found. The results were found to agree reasonably with previous results obtained on Au films.\",\"PeriodicalId\":16828,\"journal\":{\"name\":\"Journal of Physics F: Metal Physics\",\"volume\":\"47 1\",\"pages\":\"2635-2647\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1988-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"20\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Physics F: Metal Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/0305-4608/18/12/014\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Physics F: Metal Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/0305-4608/18/12/014","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 20

摘要

研究了高真空蒸发法制备的周期为2.34 ~ 23.0 nm的Au/Pd多层薄膜的电阻率随温度4.2 ~ 300 K的变化规律。化学分析用x射线衍射、电子衍射和透射电子显微镜测定样品的组成和微观结构。通过考虑晶界散射引起的电阻率增加,估计了Au/Pd界面的散射贡献。研究了两种膜,一种是等厚度的Au和Pd交替膜,另一种是恒定Au层厚度和增加Pd层厚度的膜。在两个系列中,发现Au/Pd界面的界面散射值相同。结果与之前在Au薄膜上得到的结果基本一致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of interface scattering on the resistance of polycrystalline Au/Pd multilayered thin films
The resistivity of Au/Pd multilayered thin films, obtained with high-vacuum evaporation, with layer periodicities from 2.34 nm to 23.0 nm is studied as a function of temperature between 4.2 and 300 K. Chemical analysis X-ray diffraction, electron diffraction and transmission electron microscopy served to determine the composition and microstructure of the samples. The scattering contribution of the Au/Pd interfaces was estimated by taking into account the resistivity increase resulting from grain-boundary scattering. Two series of films were investigated, one with alternate Au and Pd layers of equal thickness and the other with constant Au layer thickness and increasing Pd layer thickness. In both series the same value for the interface scattering at the Au/Pd interfaces was found. The results were found to agree reasonably with previous results obtained on Au films.
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