MEM陀螺仪的连续时间并置力反馈和读出前端

ESSCIRC Conference 2015 - 41st European Solid-State Circuits Conference (ESSCIRC) Pub Date : 2015-11-02 DOI:10.1109/ESSCIRC.2015.7313914

S. Nessler, M. Marx, M. Maurer, S. Rombach, Y. Manoli

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引用次数: 9

摘要

实现了闭环连续时间delta-sigma (CT ΔΣ)微机电陀螺仪读出电路的前端电路。这项工作首次提出了CT并置反馈，它同时使用传感器的检测电容进行信号读出和反馈。这是通过调制读出放大器的输入共模来实现的，并且完全依靠CT技术来实现低本底噪声。此外，该概念减少了高压(HV)域信号的数量和复杂性。因此，所开发的高压接口对正交补偿和模式匹配的功率和面积要求降低。该电路采用0.35 μm工艺，占地0.65 mm2，功耗770 μW。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Continuous-Time Collocated Force-Feedback and Readout Front-End for MEM Gyroscopes

A front-end circuit for closed loop continuous-time delta-sigma (CT ΔΣ) micro-electro-mechanical gyroscope readout circuits is implemented. This work presents for the first time a CT collocated feedback, which simultaneously uses the detection capacitors of the sensor for the signal readout and the feedback. This is realized by the modulation of the input common mode of the readout amplifier and relies solely on CT techniques to achieve a low noise floor. Additionally, the concept decreases the number and the complexity of the signals in the high voltage (HV) domain. Therefore, the power and area demands of the developed HV interface for quadrature compensation and mode matching are reduced. The circuit is implemented in a 0.35 μm technology, requires an area of 0.65 mm2 and consumes 770 μW.

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来源期刊

ESSCIRC Conference 2015 - 41st European Solid-State Circuits Conference (ESSCIRC)

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