{"title":"晶圆对晶圆对准技术","authors":"R.L. Smith, S.D. Collins","doi":"10.1016/0250-6874(89)80131-3","DOIUrl":null,"url":null,"abstract":"<div><p>A simple, inexpensive and reliable wafer-to-wafer alignment technique is presented for use in the fabrication of microsensors and microactuators. The technique provides ±5 μm alignment precision and requires no special optical or mechanical fixtures.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"20 3","pages":"Pages 315-316"},"PeriodicalIF":0.0000,"publicationDate":"1989-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)80131-3","citationCount":"10","resultStr":"{\"title\":\"A wafer-to-wafer alignment technique\",\"authors\":\"R.L. Smith, S.D. Collins\",\"doi\":\"10.1016/0250-6874(89)80131-3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>A simple, inexpensive and reliable wafer-to-wafer alignment technique is presented for use in the fabrication of microsensors and microactuators. The technique provides ±5 μm alignment precision and requires no special optical or mechanical fixtures.</p></div>\",\"PeriodicalId\":101159,\"journal\":{\"name\":\"Sensors and Actuators\",\"volume\":\"20 3\",\"pages\":\"Pages 315-316\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0250-6874(89)80131-3\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0250687489801313\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489801313","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A simple, inexpensive and reliable wafer-to-wafer alignment technique is presented for use in the fabrication of microsensors and microactuators. The technique provides ±5 μm alignment precision and requires no special optical or mechanical fixtures.
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