低压范围内高灵敏度MEMS MIM电容式压力传感器的设计与仿真

Q2 Engineering

Energy Harvesting and Systems Pub Date : 2021-11-01 DOI:10.1515/ehs-2021-0017

H. Ansari, Z. Kordrostami

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引用次数: 1

摘要

本文研究了电容式MEMS压力传感器灵敏度的提高。所提出的传感器弹簧可以提高传感器的灵敏度。硅作为衬底，金和硝酸铝分别作为隔膜层和介电层。膜片尺寸为150 μ m × 150 μ m，由四个弹簧悬吊。膜片与上电极之间的气隙为1.5µm。所提出的结构是1 - 20kpa范围内压力的有效传感器。采用该设计，MEMS传感器在18 kPa时的灵敏度提高到663 (× 10−3 pF/kPa)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range

Abstract In this paper, the improvement of the sensitivity of a capacitive MEMS pressure sensor is investigated. The proposed spring for the sensor can increase the sensitivity. Silicon is used as the substrate and gold and aluminium nitrate are used as the diaphragm and the dielectric layer, respectively. The dimensions of the diaphragm are 150 µm × 150 µm, which is suspended by four springs. The air gap between the diaphragm and the top electrode is 1.5 µm. The proposed structure is an efficient sensor for the pressures in the range of 1–20 kPa. By using the proposed design, the sensitivity of the MEMS sensor in 18 kPa has improved to 663 (× 10−3 pF/kPa).

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来源期刊

Energy Harvesting and Systems Energy-Energy Engineering and Power Technology

CiteScore

2.00

自引率

0.00%

发文量