电容式微机械超声换能器的P4M-3实验表征

2007 IEEE Ultrasonics Symposium Proceedings Pub Date : 2007-12-26 DOI:10.1109/ULTSYM.2007.536

S. Oleum, A. Atalar, H. Koymen, K. Oguz, M. N. Senlik

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引用次数: 1

摘要

本文采用牺牲表面微加工工艺制备了电容式超声换能器。为了测量所制器件的绝对发射和接收灵敏度光谱，建立了一套测试程序。实验是在油中进行的。进行了脉冲回波实验，并将结果与使用校准换能器的间距捕获测量结果进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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P4M-3 Experimental Characterization of Capacitive Micromachined Ultrasonic Transducers

In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micro- machining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.

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2007 IEEE Ultrasonics Symposium Proceedings

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