基于无钩机构的平面单动器双稳开关

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI:10.1109/Transducers50396.2021.9495406

Zehua Lan, Qi Tao, Zili Tang, T. Tsuchiya, M. Wong, X. Wang

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引用次数: 0

摘要

本文提出了一种微加工平面双稳态开关，该开关在两种稳定状态之间切换不需要钩子锁定结构。无钩双稳机构连接到由单个驱动器驱动的杠杆放大器，由四根梁组成，无尖角设计，提高了耐用性，降低了制造难度。设置电压为11v，复位电压为12.5 V。通过连续执行超过30,000次的ON/OFF开关，该开关具有高鲁棒性，并为需要高度耐用的微开关的应用提供了潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Planar Single-Actuator Bi-Stable Switch Based on Hookless Mechanism

This work presents a micro-fabricated planar bi-stable switch that requires no hook locking structure for switching between its two stable states. The hookless bi-stable mechanism is connected to a lever-amplifier driving by a single actuator and is built from four beams without sharp-angled design, improving durability and reducing fabrication difficulty. The setting and resetting voltages are 11 V and 12.5 V, respectively. By continuously performing more than 30,000 times of ON/OFF switching, the switch exhibits high robustness and offers potential for applications requiring a highly durable micro-switch.

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来源期刊

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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