D. Shah, H. Reddy, N. Kinsey, V. Shalaev, A. Boltasseva
{"title":"超薄等离子体TiN薄膜的光学特性","authors":"D. Shah, H. Reddy, N. Kinsey, V. Shalaev, A. Boltasseva","doi":"10.1364/CLEO_SI.2017.SM4K.3","DOIUrl":null,"url":null,"abstract":"Epitaxial, ultrathin (<10 nm) plasmonic TiN films are characterized using spectroscopic ellipsometry and Hall measurements. Thin films with thicknesses down to 2 nm remain highly metallic with a carrier concentration on the order of 10<sup>22</sup> cm<sup>−3</sup>.","PeriodicalId":6652,"journal":{"name":"2017 Conference on Lasers and Electro-Optics (CLEO)","volume":"76 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Optical properties of ultrathin plasmonic TiN films\",\"authors\":\"D. Shah, H. Reddy, N. Kinsey, V. Shalaev, A. Boltasseva\",\"doi\":\"10.1364/CLEO_SI.2017.SM4K.3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Epitaxial, ultrathin (<10 nm) plasmonic TiN films are characterized using spectroscopic ellipsometry and Hall measurements. Thin films with thicknesses down to 2 nm remain highly metallic with a carrier concentration on the order of 10<sup>22</sup> cm<sup>−3</sup>.\",\"PeriodicalId\":6652,\"journal\":{\"name\":\"2017 Conference on Lasers and Electro-Optics (CLEO)\",\"volume\":\"76 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-05-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 Conference on Lasers and Electro-Optics (CLEO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/CLEO_SI.2017.SM4K.3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Conference on Lasers and Electro-Optics (CLEO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEO_SI.2017.SM4K.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optical properties of ultrathin plasmonic TiN films
Epitaxial, ultrathin (<10 nm) plasmonic TiN films are characterized using spectroscopic ellipsometry and Hall measurements. Thin films with thicknesses down to 2 nm remain highly metallic with a carrier concentration on the order of 1022 cm−3.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
