三坐标测量臂的变形测量与补偿

Optomechatronic Technologies (ISOT), 2010 International Symposium on : 25-27 Oct. 2010 : [Toronto, ON]. International Symposium on Optomechatronic Technologies (2010 : Toronto, Ont.) Pub Date : 2010-10-01 DOI:10.1109/ISOT.2010.5687319

M. Vrhovec, I. Kovac, M. Munih

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引用次数: 9

摘要

本文讨论了坐标测量臂(CMA)的精度问题。总结了影响cma测量不确定度的误差来源。其次，重点讨论了作为主要误差源之一的弹性变形。提出了一种新的系统，专门用于测量连杆挠度。对该系统进行了详细的评估。结果证实了该系统的适用性，随后将其安装在CMA段上进行测量1。1 .外力对管片挠度的影响连杆挠度和动态测量3。CMA变形补偿。在30µm处测量了线段的垂直变形，在40µm处测量了动态变形，而补偿后的改善幅度为11%至16%。

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Measurement and compensation of deformations in coordinate measurement arm

The paper is dealing with Coordinate Measuring Arm (CMA) accuracy. Error sources contributing to the measurement uncertainty of CMAs are summarized. In sequence, the focus is on elastic deformations as one of the main error sources. A novel system is presented, developed specifically for measuring link deflections. A detailed evaluation of the system was performed. The results confirmed suitability of the system, which was subsequently mounted on a CMA segment for measurements of 1. external force influence on segment deflection, 2. dynamic measurements of link deflection and 3. compensation of CMA deformations. Vertical deformation in the segment was measured at 30 µm, the dynamic deformations were measured at 40 µm, while the improvement with compensation was found in order of 11% to 16%.

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Optomechatronic Technologies (ISOT), 2010 International Symposium on : 25-27 Oct. 2010 : [Toronto, ON]. International Symposium on Optomechatronic Technologies (2010 : Toronto, Ont.)

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