粒状多晶硅在2450 MHz微波熔炼过程中的介电性能和电磁波吸收性能

IF 0.9 4区 工程技术 Q4 ENGINEERING, CHEMICAL
Jin Lin, Fucheng Zhang, Yongzhen Bai, Xiaobiao Shang, Ruogu Kang
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引用次数: 2

摘要

粒状多晶硅的介电性能和电磁波吸收性能对微波冶炼效率有重要影响。本研究采用圆柱腔摄动法测量颗粒多晶硅在室温(25℃)至800℃2450 MHz下的介电参数(介电常数、介电损耗因子和损耗正切),并根据电磁波传输线理论计算颗粒多晶硅的反射损耗,分析温度对微波吸收性能的影响。结果表明,颗粒多晶硅的介电常数和介电因子损耗在300℃前变化不大,但当温度高于300℃时,介电常数和介电因子逐渐增大。颗粒状多晶硅的微波吸收性能随颗粒厚度的增加而波动,存在多个吸收峰,吸收峰的位置和强度随温度的升高而变化。该研究为粒状多晶硅熔炼工艺参数的优化和微波熔炼设备的设计提供了理论指导。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dielectric properties and electromagnetic wave absorbing performance of granular polysilicon during 2450 MHz microwave smelting
Abstract The dielectric properties and electromagnetic wave absorbing performance of granular polysilicon have important influences on microwave smelting efficiency. In this study, the dielectric parameters (dielectric constant, dielectric loss factor and loss tangent) of granular polysilicon were measured from room temperature (25 °C) to 800 °C at 2450 MHz by using the cylindrical cavity perturbation method, and the reflection loss of granular polysilicon was calculated according to the theory of electromagnetic wave transmission line, and then the effects of temperature on microwave absorbing performance was analyzed. The results indicated that the dielectric constant and dielectric factor loss of granular polysilicon change little before 300 °C, but when the temperature is higher than 300 °C, the dielectric constant and dielectric loss factor increase gradually. The microwave absorbing performance of granular polysilicon fluctuates with the increase of granules thickness, there are multiple absorption peaks, and the position and intensity of absorption peaks change with the increasing temperature. This study provides theoretical guidance for the optimization of smelting process parameters of granular polysilicon and the design of microwave smelting equipment.
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来源期刊
Journal of Microwave Power and Electromagnetic Energy
Journal of Microwave Power and Electromagnetic Energy ENGINEERING, CHEMICAL-ENGINEERING, ELECTRICAL & ELECTRONIC
CiteScore
2.50
自引率
6.70%
发文量
21
期刊介绍: The Journal of the Microwave Power Energy (JMPEE) is a quarterly publication of the International Microwave Power Institute (IMPI), aimed to be one of the primary sources of the most reliable information in the arts and sciences of microwave and RF technology. JMPEE provides space to engineers and researchers for presenting papers about non-communication applications of microwave and RF, mostly industrial, scientific, medical and instrumentation. Topics include, but are not limited to: applications in materials science and nanotechnology, characterization of biological tissues, food industry applications, green chemistry, health and therapeutic applications, microwave chemistry, microwave processing of materials, soil remediation, and waste processing.
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