{"title":"沉积温度对非晶氧化锌薄膜特性的影响","authors":"S. OmprakashS, K. NaveenKumarS.","doi":"10.14299/IJSER.2021.05.04","DOIUrl":null,"url":null,"abstract":"In this paper, we discuss the deposition of amorphous zinc oxide (a: ZnO) thin film at two different temperatures by spray pyrolysis unit for Thin Film Transistor (TFT) application. The a: ZnO films were studied for its structural, morphology, composition, optical and electrical properties by means of XRD, SEM, EDAX, UV-Visible spectroscopy and I-V measurement system respectively. The film thickness characterized by optical Profilometer. The SEM images exhibit the variation in temperature leads to the crystallinity of the film. The XRD spectrum confirmed the films were amorphous in nature.","PeriodicalId":14354,"journal":{"name":"International journal of scientific and engineering research","volume":"17 1","pages":"806-813"},"PeriodicalIF":0.0000,"publicationDate":"2021-05-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Impact of Deposition Temperature on Amorphous Zinc Oxide Thin Film Characteristics\",\"authors\":\"S. OmprakashS, K. NaveenKumarS.\",\"doi\":\"10.14299/IJSER.2021.05.04\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we discuss the deposition of amorphous zinc oxide (a: ZnO) thin film at two different temperatures by spray pyrolysis unit for Thin Film Transistor (TFT) application. The a: ZnO films were studied for its structural, morphology, composition, optical and electrical properties by means of XRD, SEM, EDAX, UV-Visible spectroscopy and I-V measurement system respectively. The film thickness characterized by optical Profilometer. The SEM images exhibit the variation in temperature leads to the crystallinity of the film. The XRD spectrum confirmed the films were amorphous in nature.\",\"PeriodicalId\":14354,\"journal\":{\"name\":\"International journal of scientific and engineering research\",\"volume\":\"17 1\",\"pages\":\"806-813\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-05-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International journal of scientific and engineering research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.14299/IJSER.2021.05.04\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International journal of scientific and engineering research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14299/IJSER.2021.05.04","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Impact of Deposition Temperature on Amorphous Zinc Oxide Thin Film Characteristics
In this paper, we discuss the deposition of amorphous zinc oxide (a: ZnO) thin film at two different temperatures by spray pyrolysis unit for Thin Film Transistor (TFT) application. The a: ZnO films were studied for its structural, morphology, composition, optical and electrical properties by means of XRD, SEM, EDAX, UV-Visible spectroscopy and I-V measurement system respectively. The film thickness characterized by optical Profilometer. The SEM images exhibit the variation in temperature leads to the crystallinity of the film. The XRD spectrum confirmed the films were amorphous in nature.
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