用于气体和液体样品光谱鉴定的Mems离子源

2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2019-12-01 DOI:10.1109/PowerMEMS49317.2019.92321108346

T. Grzebyk, M. Bigos, A. Gorecka-Drzazga, J. Dziuban, D. Hasan, Chang-Soon Lee

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引用次数: 3

摘要

本文介绍了用MEMS技术制造的两种离子源的结构、工作原理和性能，用于气体和液体样品的光谱识别。第一种是电磁阱，即使在高真空中也能有效地电离气体粒子。第二种使用电喷雾电离原理。采用相同的材料和一致的技术，可以将它们集成在单个硅玻璃芯片上。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Mems Ion Sources For Spectroscopic Identification Of Gaseous And Liquid Samples

This work describes the construction, working principle and properties of two types of ion sources made in MEMS technology, designed for spectroscopic identification of gaseous and liquid samples. The first one is formed as an electro-magnetic trap efficiently ionizing gas particles even in a high vacuum. The second one uses the principle of electro-spray ionization. The application of the same materials and consistent technology allows for their integration on a single silicon-glass chip.

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2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)

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