微机械悬臂式流量传感器流固耦合分析与仿真

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2014-04-13 DOI:10.1109/NEMS.2014.6908824

Pei Chen, Yulong Zhao, Yiyao Li

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引用次数: 1

摘要

采用数值分析和模拟仿真相结合的方法研究了一种差压流量传感器的流固耦合特性。利用流体力学和弹性力学建立了流固耦合模型，并建立了系统的理论体系来完成数值分析。然后根据FSI结果分析了流量传感器的工作机理。利用商业软件FLUENT和ANSYS完成了模拟仿真。数值分析结果与模拟仿真结果基本一致。根据数值分析和模拟仿真的结果，对流量传感器的形状和尺寸进行了优化。制作并校准了优化后的流量传感器。标定结果表明，悬臂式差压流量传感器具有理想的静态特性，在实际应用中效果良好。

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Fluid structure interaction analysis and simulation of micromachined cantilever-based flow sensor

Numerical analysis and analog simulation are used to investigate the FSI (fluid structure interaction) characteristics of a differential pressure flow sensor. The FSI model is created using the hydromechanics and elastic mechanics, and a systematic theory is created to finish the numerical analysis. Then the working mechanism of the flow sensor is analyzed depend on the FSI results. The commercial software FLUENT and ANSYS are used to finish the analog simulation. The result of numerical analysis is similar to that of analog simulation. Depend on the results of numerical analysis and analog simulation, the shape and size of the flow sensor are optimized. The optimized flow sensor is fabricated and calibrated. The calibration results show that the cantilever based differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

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来源期刊

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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