基于薄膜SOI技术的CMOS兼容三维自组装微结构

Proceedings of IEEE Sensors, 2004. Pub Date : 2004-01-01 DOI:10.1109/ICSENS.2004.1426371

F. Iker, M. Si Moussa, N. André, T. Pardoen, J. Raskin

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引用次数: 3

摘要

基于薄膜SOI晶圆制备三维自组装微结构。从曲流电感器到流量传感器的自组装结构只需要一个光刻步骤。我们的微结构的组装依赖于材料层之间的热膨胀不匹配以及控制其中一层的塑性流动。

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CMOS compatible 3-D self assembled microstructures using thin film SOI technology

3D self-assembled microstructures are processed based on thin film SOI wafers. Self assembled structures going from meander inductors to flow sensors are obtained from using only one photolithographic step. The assembly of our microstructures relies on the thermal expansion mismatch between the material layers as well as control of the plastic flow of one of the layers.

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Proceedings of IEEE Sensors, 2004.

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