衬底预处理对多层结构性能变化的预测

IF 1.2 Q3 ENGINEERING, MULTIDISCIPLINARY

International Journal of Advances in Engineering Sciences and Applied Mathematics Pub Date : 2022-12-01 DOI:10.11591/ijaas.v11.i4.pp345-355

E. L. Pankratov

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引用次数: 0

摘要

本文分析了衬底预处理对异质结构生长性能的影响。结果表明，在初步(生长开始前)退火后在缓冲层上生长外延层可以降低错配引起的应力值。本文介绍了一种分析多层结构在考虑错配应力时的传质和传热的分析方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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On prognosis of variation of properties of multilayer structure by preliminary processing of the substrate

In this paper, we analyze the effect of the preliminary processing of substrate on the properties of the grown heterostructure. It has been shown that the growth of an epitaxial layer on a buffer layer after preliminary (before starting of growth) annealing makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure with account mismatch-induced stress.

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International Journal of Advances in Engineering Sciences and Applied Mathematics ENGINEERING, MULTIDISCIPLINARY-

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期刊介绍： International Journal of Advances in Engineering Sciences and Applied Mathematics will be a thematic journal, where each issue will be dedicated to a specific area of engineering and applied mathematics. The journal will accept original articles and will also publish review article that summarize the state of the art and provide a perspective on areas of current research interest.Articles that contain purely theoretical results are discouraged.