衬底预处理对多层结构性能变化的预测

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2022-12-01 DOI:10.11591/ijaas.v11.i4.pp345-355

E. L. Pankratov

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引用次数: 0

摘要

本文分析了衬底预处理对异质结构生长性能的影响。结果表明，在初步(生长开始前)退火后在缓冲层上生长外延层可以降低错配引起的应力值。本文介绍了一种分析多层结构在考虑错配应力时的传质和传热的分析方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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On prognosis of variation of properties of multilayer structure by preliminary processing of the substrate

In this paper, we analyze the effect of the preliminary processing of substrate on the properties of the grown heterostructure. It has been shown that the growth of an epitaxial layer on a buffer layer after preliminary (before starting of growth) annealing makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure with account mismatch-induced stress.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.