{"title":"通过测量表面电阻来确定导电膜厚度的方法","authors":"Frédéric Voiron, Xavier Federspiel, Michel Ignat","doi":"10.1016/S1287-4620(00)88525-7","DOIUrl":null,"url":null,"abstract":"<div><p>To evaluate the thickness of the layers of a Ti/TiAl<sub>3</sub>/Al system, experiments based on surface resistance measurements have been performed. The thickness of each layer is deduced from a comparison among calculated and measured values of resistance. We present here a solution for the simulation of surface resistance and the results obtained with this method on Ti/TiAl<sub>3</sub>/Al systems.</p></div>","PeriodicalId":100303,"journal":{"name":"Comptes Rendus de l'Académie des Sciences - Series IIB - Mechanics-Physics-Astronomy","volume":"327 11","pages":"Pages 1197-1200"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S1287-4620(00)88525-7","citationCount":"0","resultStr":"{\"title\":\"Méthode de détermination des épaisseurs de films conducteurs par mesures de résistance de surface\",\"authors\":\"Frédéric Voiron, Xavier Federspiel, Michel Ignat\",\"doi\":\"10.1016/S1287-4620(00)88525-7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>To evaluate the thickness of the layers of a Ti/TiAl<sub>3</sub>/Al system, experiments based on surface resistance measurements have been performed. The thickness of each layer is deduced from a comparison among calculated and measured values of resistance. We present here a solution for the simulation of surface resistance and the results obtained with this method on Ti/TiAl<sub>3</sub>/Al systems.</p></div>\",\"PeriodicalId\":100303,\"journal\":{\"name\":\"Comptes Rendus de l'Académie des Sciences - Series IIB - Mechanics-Physics-Astronomy\",\"volume\":\"327 11\",\"pages\":\"Pages 1197-1200\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/S1287-4620(00)88525-7\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Comptes Rendus de l'Académie des Sciences - Series IIB - Mechanics-Physics-Astronomy\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1287462000885257\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Comptes Rendus de l'Académie des Sciences - Series IIB - Mechanics-Physics-Astronomy","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1287462000885257","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Méthode de détermination des épaisseurs de films conducteurs par mesures de résistance de surface
To evaluate the thickness of the layers of a Ti/TiAl3/Al system, experiments based on surface resistance measurements have been performed. The thickness of each layer is deduced from a comparison among calculated and measured values of resistance. We present here a solution for the simulation of surface resistance and the results obtained with this method on Ti/TiAl3/Al systems.
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