光学旋涡螺旋相板的制备

2014 International Semiconductor Conference (CAS) Pub Date : 2014-12-01 DOI:10.1109/SMICND.2014.6966416

R. Tudor, M. Kusko, C. Kusko, F. Craciunoiu, A. Avram, D. Vasilache

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引用次数: 3

摘要

本研究提出了一种基于光刻和反应离子蚀刻(RIE)等微加工技术的螺旋相板(SPPs)的可重复制造工艺。制备的spp在反射模式下工作，以产生拓扑电荷m = 2和m = 4的光涡旋。结构和功能表征证明了所制备SPP的光学质量。

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Fabrication of spiral phase plates for optical vortices

This work presents a reproductible fabrication process of spiral phase plates (SPPs) based on microfabrication techniques such as photolithography and reactive ion etching (RIE). The fabricated SPPs operate in the reflection mode in order to generate optical vortices with topological charge m = 2 and m = 4. Structural and functional characterizations prove the optical quality of the fabricated SPP.

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2014 International Semiconductor Conference (CAS)

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