石英振动MEMS的梦幻世界

O. Traon, D. Janiaud, J. Guerard, R. Lévy, S. Masson, O. Ducloux, M. Pernice, R. Taibi
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引用次数: 8

摘要

在20世纪,石英晶体一直是时间和频率以及射频应用的重要材料。石英在21世纪初一直是一种无与伦比的材料,占有80%的振荡器和射频市场,代表着今天170亿美元的市场,每年增长10%。本文描述了其他更机密的应用-振动惯性MEMS -其中石英晶体也起着重要作用。显然,石英晶体在这些高附加值的应用中仍有很大的前途,而且会持续很长一段时间。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The fairy world of quartz vibrating MEMS
Quartz crystal has been an essential material for time and frequency and radio-frequency applications during the 20th century. Quartz is always an unmatched material at the beginning of the 21st century, and hold 80 % of oscillators & RF market which represent today 17 billions market with a 10 % growth per year. This paper describes other more confidential applications - the vibrating inertial MEMS - where the quartz crystal plays also a major role. Clearly, quartz crystal has still a future in these high added value applications, and for a long time.
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