{"title":"压阻式压力传感器的信号叠加","authors":"Yu Lian-Zhong, Bao Min-Hang","doi":"10.1016/0250-6874(89)87054-4","DOIUrl":null,"url":null,"abstract":"<div><p>Signal superimposition for silicon pressure transducers is an approach to make full use of the vast area available on silicon diaphragms to boost signal output, to eliminate the sensitivity to a magnetic field for transverse-voltage type pressure sensors and some other possible applications. Three types of signal superimposition methods are proposed here and a monolithic integrated circuit pressure transducer using active amplifiers is presented.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"19 1","pages":"Pages 23-31"},"PeriodicalIF":0.0000,"publicationDate":"1989-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87054-4","citationCount":"0","resultStr":"{\"title\":\"Signal superimposition of piezoresistive pressure transducers\",\"authors\":\"Yu Lian-Zhong, Bao Min-Hang\",\"doi\":\"10.1016/0250-6874(89)87054-4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Signal superimposition for silicon pressure transducers is an approach to make full use of the vast area available on silicon diaphragms to boost signal output, to eliminate the sensitivity to a magnetic field for transverse-voltage type pressure sensors and some other possible applications. Three types of signal superimposition methods are proposed here and a monolithic integrated circuit pressure transducer using active amplifiers is presented.</p></div>\",\"PeriodicalId\":101159,\"journal\":{\"name\":\"Sensors and Actuators\",\"volume\":\"19 1\",\"pages\":\"Pages 23-31\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0250-6874(89)87054-4\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0250687489870544\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870544","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Signal superimposition of piezoresistive pressure transducers
Signal superimposition for silicon pressure transducers is an approach to make full use of the vast area available on silicon diaphragms to boost signal output, to eliminate the sensitivity to a magnetic field for transverse-voltage type pressure sensors and some other possible applications. Three types of signal superimposition methods are proposed here and a monolithic integrated circuit pressure transducer using active amplifiers is presented.