压阻式压力传感器的信号叠加

Yu Lian-Zhong, Bao Min-Hang
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引用次数: 0

摘要

硅压力传感器的信号叠加是一种充分利用硅膜片上的广阔面积来增强信号输出,消除横向电压型压力传感器对磁场的敏感性和其他一些可能应用的方法。本文提出了三种信号叠加方法,并提出了一种采用有源放大器的单片集成电路压力传感器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Signal superimposition of piezoresistive pressure transducers

Signal superimposition for silicon pressure transducers is an approach to make full use of the vast area available on silicon diaphragms to boost signal output, to eliminate the sensitivity to a magnetic field for transverse-voltage type pressure sensors and some other possible applications. Three types of signal superimposition methods are proposed here and a monolithic integrated circuit pressure transducer using active amplifiers is presented.

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