阵列垂直运动系统上处理投影的静电锁存机构

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300338

S. Takagi, H. Sasaki, M. Shikida, K. Sato

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引用次数: 2

摘要

我们之前提出了一种基于郁金香形静电离合器的阵列垂直运动系统，用于生产触觉显示器。该系统的优势在于，它能够单独操作具有高功率和大冲程的阵列末端执行器元件(输出:600 mN，位移:60 ma)。我们在系统中增加了一个新的静电锁存机制来单独控制投影状态。我们利用MEMS技术制造了一个4times4阵列静电锁存机构。机构的总尺寸为6.0 × 6.0 × 0.5 mm。我们评估了施加电压和保持力之间的关系，得到了几个mN的弹簧装置。

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Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System

We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed end-effecter elements with high-power and large strokes (output: 600 mN and displacement: 60 mum). We added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4times4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 times 6.0 times 0.5 mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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