过渡金属二硼化物超硬涂层的形成模式

2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP) Pub Date : 2020-11-09 DOI:10.1109/NAP51477.2020.9309613

A. Goncharov, A. Yunda, Ivan S. Kolinko

{"title":"过渡金属二硼化物超硬涂层的形成模式","authors":"A. Goncharov, A. Yunda, Ivan S. Kolinko","doi":"10.1109/NAP51477.2020.9309613","DOIUrl":null,"url":null,"abstract":"An analysis of the effect of magnetron sputtering parameters on the formation of structure and properties of transition metals diboride films was carried out. It was shown that main contribution in the energetic of deposition process is made by substrate temperature, substrate bias and ion current density on substrate. All these parameters are significantly depended on constructional features of a magnetron sputtering system. Depending on these parameters different structural states of transition metals diboride films from amorphouslike to nanocrystallite with growth texture normal to (00.1) plane are formed. Strongly-textured diboride coatings are superhard and overstoichiometric relative to boron.","PeriodicalId":6770,"journal":{"name":"2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP)","volume":"19 1","pages":"01TFC23-1-01TFC23-6"},"PeriodicalIF":0.0000,"publicationDate":"2020-11-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Patterns of the Formation of Transition Metal Diboride Superhard Coatings\",\"authors\":\"A. Goncharov, A. Yunda, Ivan S. Kolinko\",\"doi\":\"10.1109/NAP51477.2020.9309613\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An analysis of the effect of magnetron sputtering parameters on the formation of structure and properties of transition metals diboride films was carried out. It was shown that main contribution in the energetic of deposition process is made by substrate temperature, substrate bias and ion current density on substrate. All these parameters are significantly depended on constructional features of a magnetron sputtering system. Depending on these parameters different structural states of transition metals diboride films from amorphouslike to nanocrystallite with growth texture normal to (00.1) plane are formed. Strongly-textured diboride coatings are superhard and overstoichiometric relative to boron.\",\"PeriodicalId\":6770,\"journal\":{\"name\":\"2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP)\",\"volume\":\"19 1\",\"pages\":\"01TFC23-1-01TFC23-6\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-11-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NAP51477.2020.9309613\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NAP51477.2020.9309613","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

分析了磁控溅射参数对过渡金属二硼化物薄膜结构和性能的影响。结果表明，衬底温度、衬底偏置和衬底上的离子电流密度对沉积过程的能量贡献最大。所有这些参数在很大程度上取决于磁控溅射系统的结构特征。根据这些参数，形成了从非晶到纳米晶的过渡金属二硼化物薄膜的不同结构状态，其生长织构为(0.0.1)平面。强织构的二硼化物涂层相对于硼来说是超硬和超化学计量的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Patterns of the Formation of Transition Metal Diboride Superhard Coatings

An analysis of the effect of magnetron sputtering parameters on the formation of structure and properties of transition metals diboride films was carried out. It was shown that main contribution in the energetic of deposition process is made by substrate temperature, substrate bias and ion current density on substrate. All these parameters are significantly depended on constructional features of a magnetron sputtering system. Depending on these parameters different structural states of transition metals diboride films from amorphouslike to nanocrystallite with growth texture normal to (00.1) plane are formed. Strongly-textured diboride coatings are superhard and overstoichiometric relative to boron.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP)

自引率

0.00%

发文量