钻晶片力学研究中的一种简单模拟方法

J. Barredo, A. Fraile, C. Alarcon, L. Hermanns
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引用次数: 1

摘要

根据EWT或MWT结构,钻孔晶圆的机械强度受到孔的存在的广泛影响。在对这些试样的强度进行研究时,由于要将孔洞纳入模拟,导致模型非常笨重,计算次数也很高。传统的带孔延性材料的力学设计是基于应力集中系数的应用。这种方法在这种情况下是无效的,因为强度依赖于加载区域的大小。本文提出了一个应力集中面,为钻孔样品的模拟提供了一个更简单的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A simple approach for the simulations in the mechanical studies of drilled wafers
The mechanical strength of drilled wafers, according to a EWT or MWT structure, is widely influenced by the presence of holes. In the study of the strength of these samples, the holes should be included in the simulations resulting in very heavy models with high calculation times. The traditional mechanical design for ductile materials with holes is based in the application of stress concentration factors. This method is not valid in this case due to the strength dependence on the size of the loaded area. In this paper, a stress concentration surface is proposed getting a much simpler approach for the simulations with drilled samples.
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