{"title":"Littrow外腔激光器MOEMS调谐元件","authors":"R. Syms, A. Lohmann","doi":"10.1109/JMEMS.2003.820269","DOIUrl":null,"url":null,"abstract":"A miniature grating-tunable external cavity laser diode constructed using microoptoelectromechanical systems (MOEMS) technology is described. The tuning element is a vertically etched blazed grating mounted on a compound flexure, which consists of a cantilever in series with a portal frame. The flexure is deflected using comb electrostatic drives to rotate and translate the grating. The tuning element is prototyped using deep reactive ion etching of bonded silicon-on-insulator (SOI) material. Interferometric measurements of electromechanical performance are presented, and departures from the ideal behavior are identified. Electrostatic tuning of a Littrow external cavity laser over a range of 20 nm using a 50-V drive is demonstrated.","PeriodicalId":13438,"journal":{"name":"IEEE\\/ASME Journal of Microelectromechanical Systems","volume":"184 1","pages":"921-928"},"PeriodicalIF":0.0000,"publicationDate":"2003-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"36","resultStr":"{\"title\":\"MOEMS tuning element for a Littrow external cavity laser\",\"authors\":\"R. Syms, A. Lohmann\",\"doi\":\"10.1109/JMEMS.2003.820269\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A miniature grating-tunable external cavity laser diode constructed using microoptoelectromechanical systems (MOEMS) technology is described. The tuning element is a vertically etched blazed grating mounted on a compound flexure, which consists of a cantilever in series with a portal frame. The flexure is deflected using comb electrostatic drives to rotate and translate the grating. The tuning element is prototyped using deep reactive ion etching of bonded silicon-on-insulator (SOI) material. Interferometric measurements of electromechanical performance are presented, and departures from the ideal behavior are identified. Electrostatic tuning of a Littrow external cavity laser over a range of 20 nm using a 50-V drive is demonstrated.\",\"PeriodicalId\":13438,\"journal\":{\"name\":\"IEEE\\\\/ASME Journal of Microelectromechanical Systems\",\"volume\":\"184 1\",\"pages\":\"921-928\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"36\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE\\\\/ASME Journal of Microelectromechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/JMEMS.2003.820269\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE\\/ASME Journal of Microelectromechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/JMEMS.2003.820269","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MOEMS tuning element for a Littrow external cavity laser
A miniature grating-tunable external cavity laser diode constructed using microoptoelectromechanical systems (MOEMS) technology is described. The tuning element is a vertically etched blazed grating mounted on a compound flexure, which consists of a cantilever in series with a portal frame. The flexure is deflected using comb electrostatic drives to rotate and translate the grating. The tuning element is prototyped using deep reactive ion etching of bonded silicon-on-insulator (SOI) material. Interferometric measurements of electromechanical performance are presented, and departures from the ideal behavior are identified. Electrostatic tuning of a Littrow external cavity laser over a range of 20 nm using a 50-V drive is demonstrated.
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