基于低频EIS方法的石墨烯基生物传感器IDC结构研究

2019 12th International Conference on Developments in eSystems Engineering (DeSE) Pub Date : 2019-10-01 DOI:10.1109/DeSE.2019.00174

Manuel Baeuscher, Oliver Reinicke, Matthäus Henke, P. Mackowiak, M. Schiffer, M. Schneider-Ramelow, K. Lang, H. Ngo

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引用次数: 1

摘要

这项工作是关于基于石墨烯的生物传感应用的数字间电容(IDC)传感器的设计，制造过程和表征。采用分析模型和仿真模型对具有不同主动传感器面积和线间距比的布局进行了研究。此外，还制作了芯片，并在晶圆级上对其电学参数、电阻和电容进行了表征。该传感器已被用于通过还原氧化石墨烯功能层检测生物标志物，用生物分子固定，并通过低频电化学阻抗谱(EIS)进行表征。目的是找出在低频下灵敏度最佳的传感器布局。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Investigation of IDC Structures for Graphene Based Biosensors Using Low Frequency EIS Method

This work is about the design, manufacturing process and characterization of an interdigital capacitor (IDC) sensor for graphene based biosensing applications. Certain layouts with different active sensor area and linespace ratios are investigated with analytic models and simulation models. Furthermore chips are manufactured and characterized on wafer level among the electrical parameters resistance and capacitance. The sensors have been used, for the detection of biomarkers through a functional layer reduced graphene oxide, immobilized with biomolecules, and characterized with low frequency electrochemical impedance spectroscopy (EIS). The aim is to identify the sensor layout with the best sensitivity at low frequency.

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2019 12th International Conference on Developments in eSystems Engineering (DeSE)

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