用于紧凑型红外传感系统的基于Si/SiO2的高台面波导

Y. Matsunaga, S. Yano, Kosuke Kameyama, H. Wado, Y. Takeuchi, K. Hamamoto
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引用次数: 3

摘要

高台面波导已被制造用于紧凑的红外传感系统,因为它们的优点是在其固体波导外具有光学倏逝场,因此这有助于在紧凑区域内感应气体或液体。与传统的反应离子刻蚀(RIE)技术相比,采用中性环放电(NLD)等离子体刻蚀技术在绝缘体(SOI)基Si/SiO2高台波导上制备的半导体具有极低的传播损耗。此外,我们还演示了对液体甲醇的实际传感。通过使用6 mm的基于soi的Si/SiO2高台面波导,波导宽度为0.7微米,我们首次成功地获得了足够的红外吸收,因此,这证明了所提出的波导具有波导外的光场。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
SOI-based Si/SiO2 high-mesa waveguides for a compact infrared sensing system
High-mesa waveguides have been fabricated for a compact infrared sensing system, as they have a benefit of having optical evanescent field outside of their solid waveguides and thus this contributes to the sensing of gas or liquid in a compact area. Fabricated semiconductor on insulator (SOI)-based Si/SiO2 high-mesa waveguides, by using neutral loop discharge (NLD) plasma etching technique, showed extremely low propagation loss compared to those fabricated by using conventional reactive ion etching (RIE) technique. Moreover, we also demonstrate actual sensing for liquid methanol. By using 6 mm SOI-based Si/SiO2 high-mesa waveguide with waveguide width of 0.7 micro-meters, we could successfully obtain sufficient infrared absorption for the first time, therefore, this proved that the proposed waveguide had an optical field outside of the waveguide.
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